Abstract: This disclosure relates to a surface processing apparatus for use in the surface processing of a substrate. The surface processing apparatus comprises a plasma source including a wall defining a plasma chamber and an excitation source adjacent the wall and a processing chamber in which a substrate having a predetermined maximum lateral dimension is mounted in use, the processing chamber being operatively connected to the plasma source. A transmission plate for the transmission of plasma in use is arranged between the plasma source and processing chamber, the transmission plate comprising a plurality of apertures. The apertures follow a non-rectilinear path through the transmission plate such that there is no line of sight in use between a substrate with the predetermined maximum lateral dimension mounted in the processing chamber and the most intense region of the plasma in the plasma chamber.

Abstract: An x-ray analyser for a transmission electron microscope is described. The analyser has a silicon drift detector moveable in use between an analysis position and a retracted position. The analyser has a housing having an end portion within which the silicon drift detector is retained. The end portion is formed from a material with a relative magnetic permeability of less than 1.004. The analyser also has an automatic retraction system adapted to move the silicon drift detector from the analysis position to the retracted position upon receipt of a trigger signal indicative of a condition in which the power level received by the silicon drift detector from impinging x-rays or electrons is above a predetermined threshold.

Abstract: A cryogen free cooling apparatus comprises at least one heat radiation shield (54) surrounding a working region (20) and located in a vacuum chamber (4). A cryogen free cooling system has a cooling stage coupled to the heat radiation shield (54). Aligned apertures (56,58) are provided in the heat radiation shield and vacuum chamber walls. Sample loading apparatus has a sample holding device (2) attached to one or more elongate probes (3) for inserting the sample holding device through the aligned apertures (56,58) to the working region (20); and a thermal connector enables the sample holding device to be releasably coupled for heat conduction via said connector to a cold body or cold bodies within the vacuum chamber so as to pre-cool a sample on or in the sample holding device.