Patents Assigned to Oxford Instruments PLC
  • Patent number: 10107832
    Abstract: A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.
    Type: Grant
    Filed: June 26, 2017
    Date of Patent: October 23, 2018
    Assignee: Oxford Instruments PLC
    Inventors: Roger Proksch, Jason Cleveland, Dan Bocek, Todd Day, Mario Viani, Clint Callahan
  • Patent number: 9689890
    Abstract: A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.
    Type: Grant
    Filed: January 6, 2015
    Date of Patent: June 27, 2017
    Assignees: Oxford Instruments PLC, Oxford Instruments AFM, Inc
    Inventors: Roger Proksch, Jason Cleveland, Dan Bocek, Todd Day, Mario Viani, Clint Callahan
  • Patent number: 9528859
    Abstract: Techniques for coupling with devices that convert displacements into differential voltages and improve the sensitivity of such devices. A transducer operates based on changes of inductances between primary and secondary of a transformer to produce a differential signal that includes a noninverted signal and an inverted signal. A switch receives the noninverted signal and the inverted signal. A processor creates a square wave signal for driving the transducer input, and also digitally creates an inverted transducer output. A filter operates to filter the square wave output from the processor to produce a substantially single frequency signal at a specified timing having a specified phase relationship relative to the first phase inversion signal based on instructions that are executed by the processor.
    Type: Grant
    Filed: May 1, 2015
    Date of Patent: December 27, 2016
    Assignees: Oxford Instruments AFM Inc, Oxford Instruments PLC
    Inventor: Dan Bocek
  • Patent number: 9366693
    Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: June 14, 2016
    Assignees: Oxford Instruments PLC, Oxford Instruments AFM Inc
    Inventors: Roger B Proksch, Roger C Callahan
  • Patent number: 9069007
    Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.
    Type: Grant
    Filed: May 28, 2013
    Date of Patent: June 30, 2015
    Assignees: Oxford Instruments PLC, Oxford Instruments AFM Inc
    Inventor: Roger B. Proksch
  • Patent number: 9063042
    Abstract: A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements.
    Type: Grant
    Filed: June 12, 2012
    Date of Patent: June 23, 2015
    Assignees: Oxford Instruments PLC, Oxford Instruments AFM Inc
    Inventors: Flavio Alejandro Bonilla, Roger Proksch, Jason Cleveland, Tim Sauter
  • Patent number: 9024623
    Abstract: Techniques for coupling with devices that convert displacements into differential voltages and improvement of the sensitivity of such devices. A transducer operates based on changes of inductances between primary and secondary of a transformer to produce a differential signal that includes a noninverted signal and an inverted signal. A switch receives the noninverted signal and the inverted signal. A processor creates a square wave signal for driving the transducer input, and also digitally creates an inverted transducer output. A filter operates to filter the square wave output from the processor to produce a substantially single frequency signal at a specified timing having a specified phase relationship relative to the first phase inversion signal based on instructions that are executed by the processor.
    Type: Grant
    Filed: September 18, 2012
    Date of Patent: May 5, 2015
    Assignees: Oxford Instruments PLC, Oxford Instruments AFM, Inc
    Inventors: Dan Bocek, Roger Proksch
  • Publication number: 20150026846
    Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.
    Type: Application
    Filed: July 16, 2013
    Publication date: January 22, 2015
    Applicants: OXFORD INSTRUMENTS AFM INC., OXFORD INSTRUMENTS PLC
    Inventors: Roger B. Proksch, Roger C. Callahan
  • Patent number: 8925376
    Abstract: A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.
    Type: Grant
    Filed: June 26, 2012
    Date of Patent: January 6, 2015
    Assignees: Oxford Instruments PLC, Oxford Instruments AFM, Inc
    Inventors: Roger Proksch, Jason Cleveland, Dan Bocek, Todd Day, Mario B. Viani, Clint Callahan
  • Patent number: 8677809
    Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.
    Type: Grant
    Filed: October 21, 2010
    Date of Patent: March 25, 2014
    Assignees: Oxford Instruments PLC, Oxford Instruments AFM, Inc
    Inventors: Roger Proksch, Anil Gannepalli
  • Publication number: 20140041084
    Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.
    Type: Application
    Filed: October 13, 2013
    Publication date: February 6, 2014
    Applicants: Oxford Instruments AFM, Inc, Oxford Instruments PLC
    Inventors: Roger Proksch, Roger C. Callahan
  • Publication number: 20130314078
    Abstract: A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.
    Type: Application
    Filed: August 6, 2013
    Publication date: November 28, 2013
    Applicants: OXFORD INSTRUMENTS AFM INC, OXFORD INSTRUMENTS PLC
    Inventors: Roger Proksch, Dan Bocek, Jason Cleveland, Matthew Longmire, Matthew Klonowski
  • Patent number: 8502525
    Abstract: A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.
    Type: Grant
    Filed: October 14, 2009
    Date of Patent: August 6, 2013
    Assignees: Oxford Instruments PLC, Oxford Instruments AFM, Inc
    Inventors: Roger Proksch, Dan Bocek, Jason Cleveland, Matthew Longmire, Matthew Klonowski
  • Patent number: 8489356
    Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.
    Type: Grant
    Filed: May 10, 2011
    Date of Patent: July 16, 2013
    Assignees: Oxford Instruments, PLC, Oxford Instruments AFM, Inc.
    Inventors: Roger B. Proksch, Roger C. Callahan
  • Patent number: 8459102
    Abstract: A digital system for controlling the quality factor in a resonant device. The resonant device can be a a device that includes a cantilever within its system, such as an atomic force microscope. The quality factor can be digitally controlled to avoid noise effect in the analog components. A direct digital synthesizer implemented in a way that provides access to the output of the phase accumulator. That output is a number which usually drives a lookup table to produce a cosine or sine output wave. The output wave is created, but the number is also adjusted to form a second number that drives a second lookup table to create an adjustment factor to adjust the output from the cosine table. The adjusted digital signal than drives a DA converter which produces an output drive for the cantilever.
    Type: Grant
    Filed: October 25, 2011
    Date of Patent: June 11, 2013
    Assignees: Oxford Instruments PLC, Oxford Instruments AFM Inc.
    Inventors: Dan Bocek, Jason Cleveland
  • Patent number: 8448501
    Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.
    Type: Grant
    Filed: October 20, 2009
    Date of Patent: May 28, 2013
    Assignees: Oxford Instruments PLC, Oxford Instruments AFM Inc.
    Inventor: Roger B Proksch
  • Patent number: 7479860
    Abstract: A magnetic field generating assembly comprising a set (A1-A3;B1-B3;C1-C3) of, typically substantially coaxial, coils substantially symmetrically arranged about a plane orthogonal to the axis. At least some of the coils carry working currents in the opposite sense to the other coils The arrangement of turns and working currents carried by the coils is such that a first working volume (10) with a substantially homogeneous magnetic field is generated within the envelope defined by the assembly, and two second working volumes (11) each with a substantially homogeneous magnetic field are generated outside the envelope, the homogeneity of each of the first and second working volumes being sufficient to perform a NMR experiment on a sample in the working volume.
    Type: Grant
    Filed: September 30, 2003
    Date of Patent: January 20, 2009
    Assignee: Oxford Instruments PLC
    Inventors: Ian Leitch McDougall, Robert Andrew Slade, Peter Hanley, Robert Carter Hawkes
  • Patent number: 7394255
    Abstract: Magnetic resonance apparatus is provided comprising a magnet having a plurality of pairs of coils arranged in respective substantially parallel planes. The coils in each pair are operable in a counter-running manner when in use so as to generate a region of magnetic field spaced apart from said planes, having sufficient uniformity to enable magnetic resonance signals to be obtained from a target within the region. The magnetic field has a magnetic field direction Z lying substantially parallel to said planes and each of the coils is elongate in a direction X substantially parallel to said planes.
    Type: Grant
    Filed: June 24, 2005
    Date of Patent: July 1, 2008
    Assignee: Oxford Instruments PLC
    Inventors: Ian Leitch McDougall, Peter Hanley
  • Patent number: 7355499
    Abstract: A magnet assembly comprising first and second sets of coils (1, 2) for generating respective magnetic fields, wherein the coils are constructed and arranged such that under working conditions, a first homogeneous region (3) can be generated within the envelope defined by the magnet 10 assembly and a second homogeneous region (4) can be generated outside the envelope, the resultant magnetic field in each region being sufficiently homogeneous to enable a NMR process to be performed on an object in the region.
    Type: Grant
    Filed: September 30, 2003
    Date of Patent: April 8, 2008
    Assignee: Oxford Instruments PLC
    Inventors: Ian Leitch McDougall, Robert Andrew Slade, Peter Hanley
  • Publication number: 20070273380
    Abstract: Magnetic resonance apparatus is provided comprising a magnet having a plurality of pairs of coils arranged in respective substantially parallel planes. The coils in each pair are operable in a counter-running manner when in use so as to generate a region of magnetic field spaced apart from said planes, having sufficient uniformity to enable magnetic resonance signals to be obtained from a target within the region. The magnetic field has a magnetic field direction Z lying substantially parallel to said planes and each of the coils is elongate in a direction X substantially parallel to said planes.
    Type: Application
    Filed: June 21, 2005
    Publication date: November 29, 2007
    Applicant: OXFORD INSTRUMENTS PLC
    Inventors: Ian McDougall, Peter Hanley