Abstract: The present invention relates to an apparatus and a process for regenerating a used etchant solution, which solution contains a metal in divalent form. The apparatus includes a tank which is originally supplied with the etchant solution; a first electrolytic cell for converting solution from the tank to a solution containing a high fraction of a monovalent form of the metal; and a second electrolytic tank for plating metal from the solution containing a high fraction of the monovalent form of the metal. The details of the process of the present invention are set forth in the disclosure.
Type:
Grant
Filed:
March 27, 1996
Date of Patent:
January 6, 1998
Assignee:
Oxley Research, Inc.
Inventors:
James E. Oxley, Raymond J. Smialek, Ronald A. Putt