Abstract: A method and an apparatus for the non-thermal plasma processing of halogenated compounds. A non-thermal plasma reactor (110) with a non-thermal plasma reaction zone (116) may process one or more halogenated compounds diluted in an inert carrier gas in a gas stream (114). An alkane gas may also be added to the gas stream (114) for some halogenated compounds. A uniform polymer product may be deposited within the non-thermal plasma reactor apparatus, the polymer being derived from molecular fragments of the reactant halogenated compound and the reactant alkane gas if present. The non-thermal plasma may be provided by the use of a dielectric barrier discharge technique utilizing two co-axial dielectric tubes (126, 128) with corresponding high voltage (136) and ground (138) electrodes.