Abstract: An angular velocity sensor with a stable output characteristic using a sigma-delta type analog-to-digital converter comprising an integrator unit for integrating electric charges output from an input switching device and a digital-to-analog converter unit and holding at least two integrated values, a comparator unit for comparing at least the two integrated values output from the integrator unit with a predetermined value, and an arithmetic operation unit for operating an output signal of the comparator unit, the arithmetic operation unit provided with a differential operation unit for computing a difference between at least two comparison signals output from comparator unit.