Patents Assigned to Park Scientific Instruments Corporation
  • Piezoresistive cantilever with integral tip for scanning probe microscope
    Patent number: 5444244
    Abstract: A cantilever for a scanning probe microscope is disclosed. The cantilever includes a piezoresistor for detecting the deflection of the cantilever, and a tip which is formed integrally with the cantilever. A process of fabricating such a cantilever is also disclosed, the process yielding a tip which has a high aspect ratio and a small radius of curvature at its apex. A combined atomic force/lateral force microscope including two or more piezoresistors responsive to both the bending and torsion of the cantilever is also disclosed.
    Type: Grant
    Filed: June 3, 1993
    Date of Patent: August 22, 1995
    Assignee: Park Scientific Instruments Corporation
    Inventors: Michael D. Kirk, Ian R. Smith, Marco Tortonese, Sean S. Cahill, Timothy G. Slater