Abstract: A closed loop bromosilane process is provided to provide semiconductor grade silicon through the thermal decomposition of tribromosilane. The resulting silicon tetrabromide byproduct from this thermal decomposition is recycled in a silicon tetrabromide converter to produce converted tribromosilane.
Abstract: A process of converting a tetrahalosilane into a trihalosilane is provided that includes: diluting the tetrahalosilane with hydrogen (H2) to form a mixture; and passing the mixture through a bed of heated oxide particles to convert the tetrahalosilane into the trihalosilane.