Abstract: A method is provided, including: establishing a session over the Internet with a client device, the session configured to provide for remote control or monitoring of a manufacturing tool over the Internet via communication with a controller of the manufacturing tool, the manufacturing tool being one of a plurality of manufacturing tools in a fabrication facility (FAB); receiving a request from the client device to access an equipment model defining a representation of the manufacturing tool, the representation of the manufacturing tool; receiving data from a controller of the manufacturing tool that is stored in association with a service object of the manufacturing tool; sending to the client device, via the session, a response to the request, the response including the data received from the manufacturing tool that is stored in association with the service object.

Abstract: A multi-client multi-protocol equipment server includes: a host interface that facilitates communication with a manufacturing execution system (MES); a plurality of client interfaces, wherein each client interface facilitates communication with a client based on a Common Equipment Model (CEM) for a semiconductor manufacturing tool; and a plurality of tool interfaces, wherein each tool interface facilitates communication with a semiconductor manufacturing tool, wherein at least one of the interfaces is a Semi Equipment Communications Standard/Generic Model for Communications and Control of Manufacturing Equipment (SECS/GEM) interface that is configured in a single XML file that defines attributes of the CEM for the semiconductor manufacturing tool which uses the SECS/GEM interface, and wherein a computer executes the multi-client multi-protocol server.

Abstract: A method for controlling an automated manufacturing tool for semiconductor fabrication is provided, including the following method operations: receiving, over a network, a request from a client, the request defining an action for an automated manufacturing tool; authenticating the request; and, in response to receiving the request, triggering performance of the action by the automated manufacturing tool.

Abstract: A method and apparatus are disclosed for improving the implementation of automated job management for equipment in a factory. A multi-protocol multi-client equipment server is provided for communicating with equipment and clients utilizing multiple protocols. The equipment server incorporates an object model of each tool and communicates directly in real-time with factory equipment. By providing a multi-protocol multi-client platform, data consumer clients are effectively decoupled from job management clients, allowing next generation station controllers for monitoring and controlling equipment processing to be easily implemented.

Abstract: A method for controlling an automated manufacturing tool for semiconductor fabrication is provided, including the following method operations: receiving, over a network, a request from a client, the request defining an action for an automated manufacturing tool; authenticating the request; and, in response to receiving the request, triggering performance of the action by the automated manufacturing tool.

Abstract: A method and apparatus for web-based tool management are implemented. A tool object model provides a logical representation of the physical tool. The tool object model defines a hierarchical set of tool objects that characterize the tool, and additionally a set of method for performing actions on the tool objects. These actions also correspond to operations, which may include reporting as well as processing tasks, performed by the tool. A user may remotely control and monitor a tool using a conventional web browser. For example, a user may execute methods of the tool object model, or obtain detailed information about a tool object. User actions are passed to a server by embedding them in hypertext transfer protocol (HTTP) requests. The server receives the HTTP request, and passes the request to a corresponding page server in accordance with the action requested. Depending on the action requested, the page server may generate a web page in response, or may invoke a method of the tool object model.

Abstract: A method and apparatus are disclosed for improving the implementation of automated job management for equipment in a factory. A software library is provided that allows a job management client, such as a thin station controller client, to communicate with an equipment server, such as an equipment interface bridge (EIB). The job management client can create, control and monitor jobs conveniently and efficiently utilizing industry standard protocols. The equipment server communicates directly in real-time with factory equipment. By providing an interface between a job management client and an equipment server, data consumer clients are effectively decoupled from job management clients, allowing next generation station controllers for monitoring and controlling equipment processing to be easily implemented. Layers of expensive and complex code currently in use for job management can be replaced with a superior and cost-effective thin-client, distributed architecture.

Abstract: A system, computer program product and method for automated tool management in a multi-protocol environment. A user may issue a message in accordance with an object-oriented interapplication communication protocol to a corresponding application interface unit. The message may be a request to perform a particular action on a selected tool. The content of the message may be extracted by the corresponding application interface unit which may comprise data required by the requested action and a pointer to the object representing the tool. The application interface unit may invoke a method of the object pointed to by the pointers in the message. A value may then be procured by an equipment model where the value may be associated with particular information requested in the message about a tool or a notification informing the user that an event occurred. The equipment model may transfer the value to the appropriate user.