Abstract: An apparatus for substrate processing, mainly includes a processing unit and a fluid supply unit. The processing unit includes a platform for laying a substrate. The platform includes a plurality of injection holes defined thereon, the injection holes obliquely and downwardly extend from a top surface of the platform. The fluid supply unit includes a plurality of containers containing fluids for supplying to the processing unit and fluid-connected to the injection holes of the platform. The fluids from the fluid supply unit can be obliquely injected out from the injection holes and slightly floats and moves the substrate over the platform and reacts with the substrate.

Abstract: A system and a method for manufacturing process is provided, in which the fluid used to process the processed component is also used to move the processed component through the steps during the process. The system includes a chemical supply unit, a processing platform, and a control unit. The chemical supply unit is a device for supplying a chemical fluid to react with the processed component, as well as clean water or air that may be required in the process. The processing platform receives the chemical fluid, water and air from the chemical supply unit and provides a processing environment to process the processed component. The processing platform is designed to work with the chemical supply unit so that the chemical fluid can be supplied to the processing platform to move and react with the processed component. The control unit is a programmable electronic device.