Patents Assigned to Peripheral Products, Inc.
  • Unsupported chemical mechanical polishing belt
    Patent number: 6406363
    Abstract: A belt for polishing a workpiece such as a semiconductor wafer in a chemical mechanical polishing system includes a polymeric layer forming an endless loop and having a polishing surface on one side of the endless loop. The belt is manufactured by molding a polymeric material such as urethane in a cylindrical mold. The belt is thus made from a single layer, reducing weight, size, cost and maintenance requirements.
    Type: Grant
    Filed: August 31, 1999
    Date of Patent: June 18, 2002
    Assignees: Lam Research Corporation, Peripheral Products, Inc.
    Inventors: Cangshan Xu, Brian S. Lombardo