Patents Assigned to Peripheral Products, Inc.
  • Foam semiconductor polishing belts and pads
    Patent number: 6514301
    Abstract: A method for making high density foam semiconductor polishing pads and belts with controlled, reproducible microcellular structure by mechanical frothing. The method involves agitating a liquid polymer resin at a controlled temperature and pressure in order to produce a stable froth. Next, the resin froth is metered under pressure to a mix head where it is typically combined with a desired amount of curative before being injected or poured into a mold.
    Type: Grant
    Filed: May 25, 1999
    Date of Patent: February 4, 2003
    Assignee: Peripheral Products Inc.
    Inventor: Brian Lombardo
  • Unsupported chemical mechanical polishing belt
    Patent number: 6406363
    Abstract: A belt for polishing a workpiece such as a semiconductor wafer in a chemical mechanical polishing system includes a polymeric layer forming an endless loop and having a polishing surface on one side of the endless loop. The belt is manufactured by molding a polymeric material such as urethane in a cylindrical mold. The belt is thus made from a single layer, reducing weight, size, cost and maintenance requirements.
    Type: Grant
    Filed: August 31, 1999
    Date of Patent: June 18, 2002
    Assignees: Lam Research Corporation, Peripheral Products, Inc.
    Inventors: Cangshan Xu, Brian S. Lombardo