Abstract: An optical scanning system for examining material associated with a substrate includes at least one scanning module for displacing two or more objective lenses, at least one optical coupling system and a translation system. The two objective lenses are mounted on one or more scan arms and are constructed to scan over regions or subregions associated with the substrate. The scanning module is configured to displace the scan arm(s) to perform the scan and thereby displace the two objective lenses. Each objective lens is arranged to deliver light to the material and collect light from the material.

Abstract: Generally, a method and apparatus for processing whole wafers comprising is provided. In one embodiment, an apparatus for processing whole wafers includes a cassette, a plurality of flowcells disposed on the cassette, a fluidics station having at least one pump, at least one fluid source in communication with the pump and a cradle for receiving the cassette when coupled to the fluidic station. The flowcells generally are adapted to retain at least one whole wafer and include an inlet port and an outlet port. The pump of the fluidic station is coupled to one or more inlet ports of the flowcells disposed in the cassette. The apparatus enables multiple whole wafers to be simultaneously processed while providing flexibility of accommodate different configurations of flowcells.