Abstract: A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.

Abstract: A pumping system for evacuating gas from a plurality of chambers, includes at least one turbomolecular pump, at least two fore-vacuum pumps, at least one connection conduit extending between the at least two fore-vacuum pumps. and at least one transverse constriction for at least one of reducing and regulating gas flow.

Abstract: A vacuum pump for producing low or high vacuum has a housing having a gas inlet and a gas outlet, a pumping system located in the housing, a motor for driving the pumping system, and a control electronics for controlling operation of the pump and likewise located in the housing, with the pumping system and the control electronics being located in separate housing sections of the housing.