Abstract: A setting method includes setting the conductances of the controllable restrictions of an airborne molecular contamination measurement station. The setting method includes an initial identification step, prior to the carrying-out of an airborne molecular contamination measurement step, and during which the sampling line that has the lowest conductance when the conductance of the controllable restriction of the said sampling line is set to its maximum value is determined, and an initial conductance-setting step prior to the carrying-out of the measurement step and after the initial identification step, and during which the conductances of the controllable restrictions are set to make them correspond to the lowest conductance determined in the initial identification step. Further, a measurement station is provided for measuring airborne molecular contamination.

Abstract: A heating device is for a vacuum line in which pumped gases are intended to circulate. The heating device includes at least one radiating body to radiate in the infrared when it is heated to a temperature above 150° C. The at least one radiating body is arranged in the pumping path of the gases.

Abstract: A turbomolecular vacuum pump drives gases to be pumped from a suction orifice to a discharge orifice. In the turbomolecular vacuum pump, the surface of the internal bowl of the rotor arranged facing the shell of the stator capable of being cooled exhibits a higher emissivity than the outer surface of the rotor in fluidic communication with the pumped gases and/or the surface of the shell of the stator capable of being cooled arranged facing the internal bowl of the rotor exhibits a higher emissivity than the outer surface of the rotor in fluidic communication with the pumped gases.

Abstract: A vacuum pump includes a fan including a rotational speed to be controlled to cool the vacuum pump, a temperature sensor, and a control device that regulates the rotational speed of the fan in dependence on a power consumption of a drive of the vacuum pump and on a temperature measured by the temperature sensor. Another vacuum pump includes an electrically driven fan, an air guide hood, and a conductor that leads from the fan to a supply connection for the fan. The conductor is connected to the supply connection via an electrical connector. The connector is separated from an air flow path, defined by the air guide hood, by a partition wall.

Abstract: A pump unit includes a rough-vacuum pump and a Roots vacuum pump connected in series and upstream of the rough-vacuum pump in the direction of flow of the pumped gases. The Roots vacuum pump has three pumping stages in which the rotors are designed to be driven simultaneously in rotation by a motor of the Roots vacuum pump. A ratio of the flow rate generated by the first pumping stage of the rough-vacuum pump in the direction of flow of the pumped gases over the flow rate generated by the last pumping stage of the rough-vacuum pump is less than or equal to four.

Abstract: A dry vacuum pump has a stator (2) and two rotors (5) that are accommodated in at least one compression chamber (3) of the stator (2), the rotors (5) being configured to rotate synchronously in opposite directions so as to drive a gas to be pumped between an intake and a delivery of the vacuum pump. The rotors (5) and the compression chamber (3) of the stator (2) are coated with a nickel-phosphorus coating (11) comprising between 9% and 14% phosphorus and having a thickness greater than 20 ?m, the nickel-phosphorus coating (11) having undergone a hardening heat treatment comprising a step of heating to a treatment temperature greater than 250° C. for a treatment duration greater than one hour, so as to have a hardness greater than 700 HV.

Abstract: The invention relates to a scroll pump comprising a pressure sensor integrated into the scroll pump.

Abstract: A station for measuring airborne molecular contamination includes: at least one gas analyser; a conditioning pump; and a sequencing unit including a sequencing program defining an order for the measurements to be performed for at least two sampling lines, the sequencing unit being configured to control the connection of a sampling line to be measured, the measurement of which is programmed to follow that of a sampling line being measured, with the conditioning pump, while controlling the connection of the sampling line being measured with the at least one gas analyser. A method for measuring airborne molecular contamination using such a station is also disclosed.

Abstract: A vacuum line and method for controlling a vacuum line in which an auxiliary pumping device and a diluent gas injection device are controlled according to a first operating mode in which the pressure prevailing in the discharge pipe is maintained at less than or equal to 20,000 Pa or according to a second operating mode in which the pressure prevailing in the discharge pipe is greater than 20,000 Pa, and the injection of a diluent gas into the stream of the pumped gases is controlled, downstream of an intake of the rough pumping device, such as into the discharge pipe and/or into the rough pumping device and/or into the auxiliary pumping device by the diluent gas injection device in the second operating mode.

Abstract: A dry-type primary vacuum pump includes an injection device to distribute a purging gas in the pumping stages. The injection device includes: a first pressure sensor arranged on a common portion of the distributor, a second pressure sensor arranged on each branch of the distributor, and a control unit to generate a pulse width modulation command signal for the control of the regulation valves independently of one another as a function of the pressure measurement differences between the first pressure sensor and the second pressure sensors.

Abstract: A gas treatment device treats, at atmospheric pressure, the gases pumped by at least one rough pumping device. The gas treatment device includes a treatment chamber and at least one discharge pipe to connect a discharge of the at least one rough pumping device to an inlet of the treatment chamber. The gas treatment device further includes at least one auxiliary pumping device to lower the pressure in the at least one discharge pipe, situated less than 1 meter from the inlet of the treatment chamber, such as less than 50 cm.

Abstract: A measurement station for measuring airborne molecular contamination includes at least one gas analyser, at least two controllable isolation valves connected in parallel to the input of the at least one gas analyser, a conditioning pump, at least two calibrated orifices connected in parallel to the input of the conditioning pump, at least one distributor to connect each controllable isolation valve with, on one side, a sampling line and, on the other side, a calibrated orifice, and a control unit linked to the controllable isolation valves. The control unit commands the opening or the closing of the controllable isolation valves in order to be able to connect the at least one gas analyser with at least one sampling line.

Abstract: A vacuum device, in particular to a vacuum pump, includes a reservoir for an operating medium; an outlet connector arranged at or in the reservoir; and a selection device that selectively closes or opens the outlet connector or an outlet line, which is connected via the outlet connector to the reservoir, in dependence on whether the operating medium or water is present at the outlet connector.

Abstract: A dry type primary vacuum pump is provided, including at least two pumping stages mounted in series between a suction and a discharge of the pump; two rotors extending in the pumping stages and being configured to rotate synchronously in a reverse direction to drive a gas to be pumped between the suction and the discharge; an injection device configured to distribute a purge gas in at least one pumping stage, the injection device including at least one injector and at least one injection valve with an on or off control configured to be interposed between a purge gas supply source and the injector; and a control device configured to control opening and closing of the injection valve to inject a purge gas by successive pulses into the at least one pumping stage. A method for controlling the injection of a purge gas the vacuum pump is also provided.

Abstract: A dry vacuum pump includes an elastic outer seal and at least one elastic inner seal respectively including a first and a second end annular parts parallel to one another and inserted between a respective end piece and the half-shells, and two side rails connecting the end annular parts and which are at right angles thereto, the side rails being inserted between the half-shells, the at least one inner seal being arranged inside the outer seal so that the at least one inner seal and the outer seal form at least two successive sealing barriers for the gases.

Abstract: The invention relates to a recirculation device for a gas of a process device, said recirculation device comprising a recirculation pump, wherein the recirculation pump is a side channel pump.

Abstract: A leak detector is provided for leak-testing objects that are to be tested by spraying tracer gas, the leak detector including: a detection inlet configured to be connected to an object that is to be tested; a pumping device including a vacuum line connected to the detection inlet, a rough-vacuum pump connected to the vacuum line, and a turbomolecular vacuum pump connected to the vacuum line, a delivery of which is connected to the rough-vacuum pump; and a gas detector connected to the turbomolecular vacuum pump, the pumping device further including an ancillary pump connected to the rough-vacuum pump and being configured to lower an ultimate-vacuum pressure of tracer gas in the rough-vacuum pump. A leak detection method for leak-testing objects that are to be tested by spraying tracer gas is also provided.

Abstract: A trap is provided for a vacuum line to be mounted on a pipe connected to a reactor, the trap including: a chamber including an inlet and a bottom wall; an outlet tube in communication with the chamber and including another inlet, the inlet and the outlet tube are configured to be connected to the pipe and to permit passage of a flow of gas to be pumped coming from the reactor; and a deflector between the inlet and the another inlet, the bottom wall being below the another inlet and being an annular cup or an adjustable height cup, and conformed so as to cooperate with the deflector to permit an accumulation of solid elements in the bottom wall when the flow of gas is reduced and to expel the solid elements from the chamber by aerodynamic entrainment when the flow of gas is increased.

Abstract: A dry-type primary vacuum pump includes an injection device to distribute a purging gas in the pumping stages. The injection device includes: a first pressure sensor arranged on a common portion of the distributor, a second pressure sensor arranged on each branch of the distributor, and a control unit to generate a pulse width modulation command signal for the control of the regulation valves independently of one another as a function of the pressure measurement differences between the first pressure sensor and the second pressure sensors.

Abstract: A dry vacuum pump includes: at least one oil sump; at least one pumping stage; two rotary shafts respectively supporting at least one rotor extending into the at least one pumping stage, the rotors being configured to rotate in a synchronized manner in the reverse direction in order to convey a gas to be pumped between an intake and an outlet of the vacuum pump, the shafts being supported by bearings lubricated by a lubricant contained in the at least one oil sump; at least one lubricant sealing device interposed between the at least one oil sump and a pumping stage at the shaft passage; and at least one expansion device configured to reduce the pressure variations between a pumping side volume and the at least one oil sump.