Patents Assigned to Pfieffer Vacuum GmbH
  • Turbomolecular pump
    Patent number: 7278822
    Abstract: A turbomolecular pump includes a plurality of rotor and stator discs arranged alternatively one behind another and producing together a pumping effect, a plurality of spacer rings for retaining the stator discs at a distance from each other; and connection elements for fixedly connecting adjacent spacer rings with each other, so that the spacer rings together provide for securing and centering of the stator discs, taking over the function of a pump housing that is eliminated.
    Type: Grant
    Filed: July 14, 2004
    Date of Patent: October 9, 2007
    Assignee: Pfieffer Vacuum GmbH
    Inventor: Joerg Stanzel