Abstract: Embodiments of the invention provide a method of determining a position of an object with respect to incident radiation, comprising iteratively determining at least one of an object function indicating one or more characteristics of an object and a probe function indicative of one or more characteristics of incident radiation, iteratively determining the position of the object, wherein the iteratively determining the position of the object comprises cross correlating first and second estimates of the object function or the probe function, determining a location of a peak of the cross correlation, and determining a translation deviation indicative of a difference in position of the object between the first and second estimates based on the location of the peak.

Abstract: Embodiments of the present invention provide a method (200) of providing image data for constructing an image of a region of a target object, comprising detecting, by at least one detector (40), at least a portion of radiation scattered by a target object (30) with the incident radiation (10) or an aperture at a predetermined probe position, determining an offset vector (203) for reducing an error associated with the probe position (201), estimating a wavefront (210) based on a probe function having the offset vector applied to the probe position, and providing image data responsive to the detected radiation.

Abstract: A method of providing image data for constructing an image of a region of a target object, comprising providing a reference diffraction pattern of a reference target object; determining an initial guess for a probe function based upon the reference diffraction pattern; and determining, by an iterative process based on the initial guess for the probe function and an initial guess for an object function, image data for a target object responsive to an intensity of radiation detected by at least one detector.

Abstract: A method of providing image data for constructing an image of a region of a three dimensional target object, comprising providing, from a radiation source, incident radiation directed at a target object, detecting an intensity of radiation scattered by the target object, and determining image data for each of a respective plurality of slices within the target object each indicating one or more characteristics of the target object at a respective depth within the target object, wherein the image data is determined based on the detected intensity of radiation via an iterative process wherein running estimates of the image data for each of the plurality of slices are updated step by step.

Abstract: Embodiments of the present invention provide a method of determining at least one characteristic of a target surface, comprising providing a phase map for a first region of a target surface via radiation having a first wavelength, providing n further phase maps for the first region via radiation having a further n wavelengths each different from the first wavelength, and determining at least one characteristic at the target surface responsive to the first and further phase maps.

Abstract: Embodiments of the present invention provide a method of providing image data for constructing an image of a region of a target object, comprising providing incident radiation from a radiation source at a target object, detecting, by at least one detector, a portion of radiation scattered by the target object with the incident radiation or an aperture at first and second positions, and providing image data via an iterative process responsive to the detected radiation, wherein in said iterative process image data is provided corresponding to a portion of radiation scattered by the target object and not detected by the detector.

Abstract: A method and apparatus are disclosed for generating a plurality of scattered radiation patterns at an image an optical microscope. The apparatus includes at least one lens element, a liquid crystal display (LCD) array, and a housing comprising a body portion supporting the LCD array and lens element in a predetermined spaced apart relationship.

Abstract: A method and apparatus are disclosed for providing image data. The method includes the steps of providing incident radiation from a radiation source at a target object and, via at least one detector, detecting an intensity of radiation scattered by the target object. Also via the at least one detector an intensity of radiation provided by the radiation source absent the target object is detected. Image data is provided via an iterative process responsive to the intensity of radiation detected absent the target object and the detected intensity of radiation scattered by the target object.