Abstract: A scanning electron microscope (1) including a sliding vacuum seal (20) between an electron optical imaging system (2) and a sample carrier (10) with a first plate (22) having a first aperture (24) associated with the electron optical imaging system and resting against a second plate (26) having a second aperture (28) associated with the sample carrier. The first plate and/or the second plate includes a groove (40) circumscribing the first and/or second aperture. The scanning electron microscope may include a detector (8) movable relative to the electron beam. The scanning electron microscope may include a motion control unit for moving a sample carrier along a collision free path.
Type:
Grant
Filed:
March 3, 2017
Date of Patent:
October 6, 2020
Assignee:
Phenom-World Holding B.V.
Inventors:
Karel Diederick Van Der Mast, Adrianus Franciscus Johannes Hammen, Wilhelmus Henrica Cornelis Theuws, Sander Richard Marie Stoks
Abstract: The invention relates to a screening method. The method comprises the step of providing a sample, wherein said sample comprises a sample carrier with a surface structure, as well as an object of interest. The method further comprises the step of acquiring an image of said sample. According to the disclosure, the method comprises the steps of providing information on said surface structure of said sample carrier, which may in particular comprise the step of acquiring an image of said sample carrier. In that case two images are obtained: one more sensitive to the objects of interest, and one more sensitive to the surface structure of the sample carrier. This allows manipulation of the acquired image, using said information on the surface structure of the sample carrier. With this, said manipulated image may be screened for easy and reliable detection of said object of interest.
Abstract: Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.
Type:
Grant
Filed:
June 3, 2019
Date of Patent:
March 3, 2020
Assignee:
Phenom-World Holding B.V.
Inventors:
Gerhardus Bernardus Stamsnijder, Paul Cornelis Maria van den Bos, Ton Antonius Cornelis Henricus Kluijtmans, Sander Richard Marie Stoks, Adrianus Franciscus Johannes Hammen, Karel Diederick van der Mast
Abstract: Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.
Type:
Application
Filed:
June 3, 2019
Publication date:
September 19, 2019
Applicant:
Phenom-World Holding B.V.
Inventors:
Gerhardus Bernardus Stamsnijder, Paul Cornelis Maria van den Bos, Ton Antonius Cornelis Henricus Kluijtmans, Sander Richard Marie Stoks, Adrianus Franciscus Johannes Hammen, Karel Diederick van der Mast