Patents Assigned to Philcom Corporation - Justia Patents Search

Patents Assigned to Philcom Corporation

Hollow microprobe using a MEMS technique and a method of manufacturing the same

Patent number: 7119557

Abstract: The present invention relates to a hollow microprobe using an MEMS technique and a method of manufacturing the same.

Type: Grant

Filed: July 16, 2003

Date of Patent: October 10, 2006

Assignee: Philcom Corporation

Inventor: Oug-Ki Lee