Abstract: A film-forming method for forming a film in a film-forming apparatus includes generating first gas molecular species and second gas molecular species by causing the first source gas and the second source gas accumulated in the accumulation mechanisms to pass through respective instantaneously-heating units, sharply raising partial pressure of the first gas molecular species and partial pressure of the second gas molecular species by projectingly supplying the first gas molecular species and the second gas molecular species to the reaction chamber in which the substrate has been placed, which has been depressurized, and which has a constant capacity; bringing the first gas molecular species or the second gas molecular species into reaction by alternately repeatedly guiding the first gas molecular species or the second gas molecular species to a surface of the substrate, and forming a compound film on the surface of the substrate.

Abstract: A small-sized fluid heating/cooling apparatus for heating or cooling a large amount of gas or liquid at a low cost. Structures where a flow passage for a fluid is formed in a heated or cooled base formed in a plate shape or a column shape, and a fluid which has passed through the narrowed flow passage impinges on a wall of a side face of the base vertically to perform heat exchange are connected in series. Heat exchange is instantaneously performed in a small space and manufacture of a mechanism performing such an operation is easy. A material constituting the flow passage may be a metal or ceramics, and a small-sized fluid heat exchanging apparatus can be manufactured at a low cost.

Abstract: In a small-sized fluid heat exchanging apparatus that heats or cools a huge amount of gas or liquid, a structure makes fluid having a high flow speed impinge perpendicularly against a wall. A flow passage is divided into a high-speed flow passage and a low-speed flow passage, and the high-speed flow passage and the low-speed flow passage are arranged so as to intersect perpendicularly with each other, according to guidelines for the shape of the flow passage. A flow passage designed according to the guidelines provides highly-efficient heat exchange.

Abstract: Provided are an RF powder particle, an RF powder, and an RF powder-containing base that can make it difficult to fabricate, for example, forged documents or forged bank notes with respect to sheet-like objects having high proprietary values, such as bank notes, and that allow necessary information to be stored in each of the large number of particles which are each provided with a tank circuit having a predetermined resonant frequency. The RF powder particle includes a coil 24 (inductance element) as a magnetic filed coupling element and a condenser 25 (capacitance element) connected to the both ends of the coil on an insulating surface of a substrate 22 and is configured so as to form a tank circuit 31 by the inductance element and the capacitance element. The tank circuit 31 functions as a circuit in a resonance state or in a non-resonance state in accordance with conditions in response to a high-frequency magnetic field from outside.

Abstract: A base data management system is provided which can grasp specific data recorded in a plate-like or sheet-like object having high property values, such as a variety of cards, paper money, and securities, in real time, and can manage and track circulating paper money or the like. The base data management system includes a base data reader including a reading mechanism that reads specific data or resonance frequency recorded in a base with a magnetic field coupling and a transmitting mechanism that transmits the specific frequency date read by the reading mechanism and reader information.

Abstract: A method is provided for adding an RF powder to a sheet-like object having a high property value, such as a variety of cards, paper money, and securities. The RF powder makes it very difficult to produce, for example, counterfeit cards, documents and bills. Also, an RF powder-added base sheet to which the RF powder has been added is provided. In the method for adding the RF powder, the RF powder includes a plurality of RF powder particles 11 and is disposed on a surface of a base sheet 10 to add the RF powder to the base sheet. Each RF powder particle 11 has a magnetic field coupling circuit element in a high frequency magnetic field having a specific frequency. The RF powder is disposed on a surface of a base sheet by a printing technique. The RF powder-added base sheet 10 includes an RF powder including a plurality of RF powder particles 11 disposed within a printed object on a surface of a base sheet.

Abstract: Provided is a fluid heating device that is small in size and capable of heating a large flow of gas or liquid at a low cost. A flow path in which no backwater is produced is provided by providing grooved flow paths of a fluid are provided over an outer side surface of a metallic circular cylinder such that a fluid passing through a narrowed one of the flow paths impinges perpendicularly against a wall of the next flow path. This allows instantaneous heat exchange within a small space, and makes manufacturing of such a structure simple.

Abstract: RF particles that can render more difficult fabrication of counterfeit notes and the like, can generate radiofrequency magnetic fields by oscillation of a tank circuit having a particular resonant frequency, and that can easily and reliably supply electric power for oscillation, RF powder, and a method for exciting the RF powder are provided. In an RF powder particle, a coil (inductance element) serving as an antenna and a capacitor (capacitance element) connected to the coil are formed on an insulating film surface of a substrate. The inductance element and the capacitance element form a tank circuit, and a photovoltaic cell for supplying power to the tank circuit is disposed on the substrate.

Abstract: A substrate including a sensor unit, wherein the sensor unit includes a coil wound at least once arranged on the surface of the sensor or embedded within and near the surface thereof. With such an arrangement, an electric current that corresponds to information with respect to the substrate (e.g., the temperature of the substrate or the amount of charge stored in the substrate) flows through the coil.

Abstract: Provided is a fluid heating device that is small in size and capable of heating a large flow of gas or liquid at a low cost. A flow path in which no backwater is produced is provided by providing grooved flow paths of a fluid are provided over an outer side surface of a metallic circular cylinder such that a fluid passing through a narrowed one of the flow paths impinges perpendicularly against a wall of the next flow path. This allows instantaneous heat exchange within a small space, and makes manufacturing of such a structure simple.

Abstract: The present disclosure generally describes radio frequency (RF) particles and an RF powder-containing base including a plurality of such RF particles. The RF particles may include an antenna element and an integrated circuit element coupled together by at least one interconnection. The base may be formed from sheet-like subjects, such as various kinds of cards, bills, and documents. Methods of forming the RF powder-containing base are also generally disclosed.

Abstract: The present disclosure provides methods for manufacturing a radio frequency (RF) powder including a plurality of RF particles, each of which includes a circuit element. A plurality of circuit elements, each corresponding to a different RF particle, may be formed on a first surface of a substrate. Grooves may be etched into the first surface of the substrate between the plurality of circuit elements. A protection film may be formed on each of the plurality of circuit elements and a portion of the substrate between a second, opposite surface of the substrate and bottoms of the grooves may be removed so that each of the plurality of circuit elements is associated with the remaining portion of the substrate.

Abstract: Provided are a method for providing an RF powder that is easily handled because it is used as a powder (powdery state), not used as individual elements, and is high in applicability and extensibility, extremely low in manufacturing cost in respect of the unit price of each particle, and extremely high in practicability; and an RF powder-containing liquid. In the method for providing an RF powder, an RF powder composed of a large number of RF powder particles 11a is provided to a user in a state of being stored in a container 1. The RF powder is stored in the container 1 together with a medium that prevents the large number of RF powder particles 11a from adhering to one another. The medium is a liquid having a specific color determined so as to correspond to the characteristic frequency of the RF powder.

Abstract: A base sheet 12 has a structure that stably couples a particular chip measuring 1 mm or less on paper with an antenna line by only disposing the chip and antenna line in such a manner that the chip and antenna line are close to each other, without electrically bringing the chip and antenna line into contact with each other. The base sheet 12 includes a chip 11 having a spiral coil 13 with at least one turn disposed on a surface of the chip, or inside the chip and near the surface thereof and an antenna line 14 having a conductor part 14A orbiting around the coil 13A of the chip 11 or directly over or directly below the coil 13A so that the conductor part is magnetically coupled with the coil 13A.

Abstract: The present disclosure generally describes radio frequency (RF) particles and an RF powder-containing base including a plurality of such RF particles. The RF particles may include an antenna element and an integrated circuit element coupled together by at least one interconnection. The base may be formed from sheet-like subjects, such as various kinds of cards, bills, and documents. Methods of forming the RF powder-containing base are also generally disclosed.

Abstract: The present disclosure provides methods for manufacturing a radio frequency (RF) powder including a plurality of RF particles, each of which includes a circuit element. A plurality of circuit elements, each corresponding to a different RF particle, may be formed on a first surface of a substrate. Grooves may be etched into the first surface of the substrate between the plurality of circuit elements. A protection film may be formed on each of the plurality of circuit elements and a portion of the substrate between a second, opposite surface of the substrate and bottoms of the grooves may be removed so that each of the plurality of circuit elements is associated with the remaining portion of the substrate.

Abstract: The present invention provides an RF powder having a characteristic to be used as a powder (powdery substance) which is composed of a large quantity of particles and has a collective form, wherein each of a large quantity of particles composing the powder is smaller in size as compared with a current IC tag chip and is used as a device having a function substantially equivalent to the IC tag chip, use form thereof is not individual device use but powder use, treatment is easy, a manufacturing cost is very low in respect of a unit cost of each particle, and a practical use is very high, and a method for manufacturing the same. An RF powder 11 is used in a powder form, wherein each particle 11a in the powder has an integrated circuit 13 formed on a substrate 12, an insulating layer 14 formed on the integrated circuit, and an antenna element 15 formed on the insulating layer.

Abstract: A method for manufacturing RF powder wherein the RF powder is composed of a large amount of particles and used as collective RF powder (a powdery entity); and a large amount of RF powder particles can be obtained from a wafer in a stable manner and at a high yield is provided. The method for manufacturing RF powder is a method for manufacturing RF powder composed of a large amount of particles 11a each having a substrate 12 and a magnetic coupling circuit device 15.

Abstract: The present invention provides an RF powder-containing base including functional components, wherein forged cards, documents, bills, or the like are hard to be produced with respect to sheet-like subjects with high proprietary nature, such as various kinds of cards, bills, and securities, and each of a large number of particles can memorize information such as an identification number or the like. An RF powder-containing base 10 contains an RF powder (particles 11, 12, and 13), in which each particle of the RF powder provides an integrated circuit 15 formed on a substrate 14, an insulating layer 16 formed on the integrated circuit, and an antenna element 17 formed on the insulating layer, wherein each of the particles of the RF powder contained in the base has sensitivity to an electromagnetic waves having any of a plurality of different frequencies.

Abstract: A method for manufacturing a semiconductor device comprises dry-etching a thin film using a resist mask carrying patterns in which at least one of the width of each pattern and the space between neighboring two patterns ranges from 32 to 130 nm using a halogenated carbon-containing compound gas with the halogen being at least two members selected from the group consisting of F, I and Br. The ratio of at least one of I and Br is not more than 26% of the total amount of the halogen atoms as expressed in terms of the atomic compositional ratio to transfer the patterns onto the thin film. Such etching of a thin film avoids causing damage to the resist mask used. The resulting thin film carrying the transferred patterns is used as a mask for subjecting the underlying material to dry-etching.