Patents Assigned to PHIVE PLASMA TECHNOLOGIES LIMITED
  • PLASMA SOURCE ELECTRODE
    Publication number: 20120001549
    Abstract: An electrode tile configuration is disclosed. The tile has contoured edges dimensioned to control any coupling effects. A plurality of tiles in a matrix configuration is also described.
    Type: Application
    Filed: January 8, 2010
    Publication date: January 5, 2012
    Applicant: PHIVE PLASMA TECHNOLOGIES LIMITED
    Inventors: Albert Rogers Ellingboe, David O'Farrell, Tomasz Michna