Patents Assigned to PhoenAnkh Corp.
  • Patent number: 6074561
    Abstract: In a developing, etching and stripping apparatus, photoresist developing and stripping chemicals are drawn off into separate circulatory paths in each of which they are pumped through a heat exchanger, a series of tangential filters, an ultraviolet contactor and a collection tank. Permeate from the filters is returned to the developing or stripping stage, and solutions with high concentrations of solids are removed from the collection tanks for disposal. A similar system is used to recycle metal stripping solutions such as nitric acid-containing solutions, allowing recovery of metals.
    Type: Grant
    Filed: May 19, 1998
    Date of Patent: June 13, 2000
    Assignee: PhoenAnkh Corp.
    Inventor: Julius James Jablonsky