Abstract: The present application discloses embodiments of a temperature sensor system that uses multiple characteristics of optical radiation signals to determine a temperature of an object. The temperature sensor system includes a light source configured to emit an optical excitation signal propagating to a temperature probe having a phosphor sensing element that emits an optical excitation response signal having a characteristic of phosphorescent radiation proportional to the temperature of the object. The temperature probe emits an optical-excitation-independent signal having a characteristic of black-body radiation emitted by components of the temperature probe.

Abstract: The present application discloses embodiments of optical assemblies used in optical sensor systems where access to the equipment components or areas to be sensed is difficult. In one embodiment, an optical assembly may include a housing having an optical waveguide operative to guide an optical signal to an optical element configured to change the direction of propagation of the optical signal orthogonal to the original direction of propagation. The optical element may have a refractive surface and a reflective surface. Use of two such optical assemblies arranged optically in series enables the user to route an optical signal to propagate along an optical axis parallel to but laterally offset from the original axis of propagation. Such optical assemblies may allow optical access to regions of semiconductor manufacturing equipment such as process chambers, wafer supports, electrostatic chucks, showerheads, edge rings, or end effectors of wafer handling robots.

Abstract: An optical temperature sensing system is disclosed which includes a fiber optic sensor as a primary temperature sensor for reading a temperature of a measured object or a measured environment. The temperature probe is coupled to a converter which generates using solid-state electronic components without software, a temperature output. A temperature sensing system is also disclosed that includes a temperature sensor for reading a temperature of a measured object, and a dual converter module comprising a first converter to provide a primary temperature sensor signal, and a second converter to generate a secondary temperature sensor signal from a signal provided by the first converter. An optical temperature sensor is also described, with a conversion module that generates an output that mimics the output of a thermistor or a thermocouple.

Abstract: There is provided a fiber optic temperature probe having a base, a first tube connected to the base, a second tube provided coaxially within the first tube, a probe tip extending through an opening in a distal end of the first tube; and an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube. There is also provided a fiber optic temperature probe having a base, a first tube connected to the base, a probe tip extending through an opening in a distal end of the first tube, an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube, and a first lens positioned between the probe tip and the optical fiber.

Abstract: Single board multi-channel programmable detection sensor is disclosed. The sensor has a processor operatively connected to the emitter driver, and a photodetector for controlling one or more operational parameters of the sensor in response to a program. Sensor outputs the TTL signal when desired level of light attenuated or transmitted through the system of fiber optics sensors. The processor sets triggering levels of the signal detected by the sensor in analog fast comparator circuit to threshold based on the signal difference pre-set and actual values.

Abstract: A flexible fiber optic temperature probe is disclosed. The probe includes a plurality of fiber optic elements, a sensing member having a first and a second end, the first end connected to distal portions of the plurality of fiber optic elements, and a flexible jacket surrounding the plurality of fiber optic elements. The flexible jacket is engaged with the sensing member to prevent relative movement between the flexible jacket and the sensing member.

Abstract: There is provided a temperature sensor including an optical fiber, and a sensing element spaced from the optical fiber. The sensing element is encapsulated in a optically transparent, non-porous material, isolating the sensing element from a surrounding environment. The optical fiber is aligned with the sensing element to deliver a source beam to interact with the sensing element and detect a return beam, where the return beam exhibits a temperature dependent property that is measured to determine a temperature of a measured object thermally coupled to the sensing element.

Abstract: The following provides a system and method for 2-D thermal imaging of phosphor coated surfaces. The system and method enable increased temperature measurement accuracy and speed of data analysis by implementing a control system that controls simultaneously an illumination system and an image capture device including a high speed camera. More particularly, the control system can control the illumination system and the camera to acquire images when emitted light intensity ranges are in a desired range to improve temperature measurement accuracy, and to increase the speed of data processing.

Abstract: A temperature sensing system is provided, including an optical temperature sensing probe; a cable coupled to the probe for interfacing the probe with a converter via a connector; an optical fiber carried through the cable from the probe; and a calibration module positioned in the probe or connector, wherein the connector comprises at least two electrical conductors to enable the calibration module to communicate with the converter via the connector. A connector is also provided for connecting an optical temperature sensing probe to a converter via a cable coupled to the connector, the connector including a bore for carrying an optical fiber from the cable to the converter; at least two contact points; and at least two electrical connections via the at least two contact points.

Abstract: The invention pertains to a low-profile, optical sensor to measure distance having a light emitter and a light sensor. More particularly, the optical sensor includes a focusing film having a series of blinds to filter diffused reflected light without the need for a focusing lens. The optical sensors can be used in a variety of applications, including using two sensors to measure thickness of an object or the use of 3 sensors to determine the angle between two surfaces. The invention further pertains to a calibration sensor and method of calibration using 3 or more optical sensors to level a showerhead and a chuck in a semi-conductor deposition apparatus.

Abstract: A precision edge detection system and sensor assembly is provided that uses a reflection technique to provide an energy efficient device that can be achieved using a relatively small form factor. There is provided an optical reflective sensor assembly that includes a light source, an optical element positioned to collimate and focus light from the light source to generate a focused beam, and at least one photodetector positioned adjacent the light source. The at least one photodetector is configured to detect light from the focused beam that has been reflected by an object positioned opposite the light source.

Abstract: There is provided a fiber optic temperature probe having a base, a first tube connected to the base, a second tube provided coaxially within the first tube, a probe tip extending through an opening in a distal end of the first tube; and an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube. There is also provided a fiber optic temperature probe having a base, a first tube connected to the base, a probe tip extending through an opening in a distal end of the first tube, an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube, and a first lens positioned between the probe tip and the optical fiber.

Abstract: A precision edge detection system and sensor assembly is provided that uses a reflection technique to provide an energy efficient device that can be achieved using a relatively small form factor. There is provided an optical reflective sensor assembly that includes a light source, an optical element positioned to collimate and focus light from the light source to generate a focused beam, and at least one photodetector positioned adjacent the light source. The at least one photodetector is configured to detect light from the focused beam that has been reflected by an object positioned opposite the light source.

Abstract: There is provided a temperature sensor comprising: an optical fiber; and a sensing element spaced from the optical fiber; wherein the optical fiber is aligned with the sensing element to deliver a source beam to interact with the sensing element and detect a return beam, the return beam exhibiting a temperature dependent property that is measured to determine a temperature of a measured object thermally coupled to the sensing element.

Abstract: An L2F velocimeter comprises a probe for insertion into a fluid, the probe having an open area therein to allow the fluid to pass through. The probe comprises an illumination system to direct a pair of light beams, separated by a distance, through the open area, and a collection system to collect forward scattered light scattered from particles in the fluid. The collection system has an optical axis in common with the illumination system. The velocimeter further comprises an electro optical assembly connected to the probe to provide light to the illumination system, to receive light collected from the collection system, to measure a lapse time in fluctuations of the forward scattered light created by particles passing through the pair of light beams and to calculate the velocity of the fluid based on the lapse time and the separation distance.

Abstract: An L2F velocimeter comprises a probe for insertion into a fluid, the probe having an open area therein to allow the fluid to pass through. The probe comprises an illumination system to direct a pair of light beams, separated by a distance, through the open area, and a collection system to collect forward scattered light scattered from particles in the fluid. The collection system has an optical axis in common with the illumination system. The velocimeter further comprises an electro optical assembly connected to the probe to provide light to the illumination system, to receive light collected from the collection system, to measure a lapse time in fluctuations of the forward scattered light created by particles passing through the pair of light beams and to calculate the velocity of the fluid based on the lapse time and the separation distance.

Abstract: A method for measuring the velocity of a multiphase fluid flowing in a pipe. The method comprises directing at least two collimated beams of light from an illuminator through the multiphase fluid by transparent portions of the pipe. The at least two collimated beams are spaced apart in a direction of flow of the multiphase fluid by a predetermined distance. The method also includes detecting scattered, deflected and attenuated light with at least two photodetectors to produce at least two signals. The at least two photodetectors are associated with the at least two collimated beams. The method also includes calculating a cross-correlation function between the at least two signals to determine a time delay between the signals and calculating the average velocity of the multiphase fluid by taking the ratio of the predetermined distance to the time delay.

Abstract: The invention provides an optical flow meter for measuring fluid flow through a pipe which obviates the need for the flow to be seeded with foreign particles. The meter comprises a fiber optic Sagnac interferometer with optical path crossing the flowing fluid. The interferometer measures velocity of the fluid by measuring the phase difference between the two beams propagating in the optical path in opposite directions. Light, which is deflected by the fluid, is collected by optical means at both sides of the optical path for calculation, the scintillating statistics and compensation for light intensity.

Abstract: The invention provides an optical flow meter for measuring fluid flow through a pipe which obviates the need for the flow to be seeded with foreign particles. The meter comprises a fiber optic Sagnac interferometer with optical path crossing the flowing fluid. The interferometer measures velocity of the fluid by measuring the phase difference between the two beams propagating in the optical path in opposite directions. Light, which is deflected by the fluid, is collected by optical means at both sides of the optical path for calculation, the scintillating statistics and compensation for light intensity.

Abstract: An optical system design for measuring the velocity of fluids flowing through pipes or other conduits is disclosed. The optical system is comprised of a means for delivering two beams through a window in the wall of the pipe, focused to two points aligned along an axis of the pipe and separated by a known distance, and means for detecting light that is scattered by particles carried in the fluid stream through a second window, that is disposed on the opposite side of the pipe. By measuring the time delay between detected signals, the velocity of the fluid can be determined. The delivered light beams are focused in a shallow cone of light and are blocked by an obstruction disposed behind the second window. The scattered light passes through an aperture behind the second window that surrounds the obscuration, and is focused on to a detector surface.