Abstract: Accurate measurements of the concentration of a sterilant in a sterilization chamber are provided through the use of a light source, a first detector that receives light from the light source that has not passed through the sterilization chamber and a detector that receives light from the light source that has passed through the sterilization chamber. The light contains wavelengths known to be absorbed by the sterilant. A controller receives and processes signals received from the two detectors to cancel changes in the output of the light source and then apply a modified Beer-Lambert law to determine the concentration of the sterilant gas.

Abstract: The present invention relates to an apparatus and method for enhancement of the stream of plasma particles created by the process of cathode arc vapor deposition. The apparatus is designed to control through trapping the plasma particles generated from a sacrificial cathode plasma source and focus the plasma particle stream to collide with and deposit upon the substrate to be coated. The apparatus includes a magnetic field generator for generating a magnetic field of a distinctive cusp shape. The anode is insulated from the chamber to strengthen and sharpen the electric field potential created in the chamber. This stronger, sharper electric field potential is contoured to create an electron trap having an aperture through which the plasma ions are directed at the substrate to be coated. The specific configuration described directs the plasma particles efficiently in that the plasma deposition rate is higher per unit of magnetic field strength than can be obtained with other commercial designs.