Patents Assigned to Physical Electronics Industries, Inc.
  • Scanning auger microprobe with variable axial aperture
    Patent number: 4048498
    Abstract: A scanning Auger microprobe in a cylindrical mirror analyzer is provided wherein an aperture plate at the exit stage is controllably variable in aperture size and is positioned near the second order focus point and at the minimum trace of the analyzer. Control of the aperture size is provided in both an infinitely variable arrangement and in a three size exit aperture arrangement.
    Type: Grant
    Filed: September 1, 1976
    Date of Patent: September 13, 1977
    Assignee: Physical Electronics Industries, Inc.
    Inventors: Robert L. Gerlach, Paul W. Palmberg