Abstract: A micro-mechanical electrical systems (MEMS) type accelerometer for measuring vibration and movement employs a closed loop measurement mode. The accelerometer comprises at least one capacitive section configured as a sensing section and at least one capacitive section configured as an actuator section. In embodiments of the accelerometer capacitor plates are arranged in a bilateral structure in both the sensing and actuator sections. This structure combined with the capacitive feedback provided by the closed loop operation and other features of the device allow for a much larger sensing range in addition to other advantages over presently available MEMS accelerometers.
Type:
Grant
Filed:
December 26, 2017
Date of Patent:
October 27, 2020
Assignee:
PHYSICAL LOGIC LTD.
Inventors:
Lisa Koenigsberg, Boris Grinberg, Aviram Feingold, Roza Wolfson