Abstract: An actuator, which can include piezoelectric material, is provided in the form of a single-layer or multi-layer flat plate. At least one layer has two electrodes spaced from each other by means of a separating area and arranged opposite each other both on the upper face of the at least one layer and on the lower face of the at least one layer. The electrodes of the upper face are arranged at an offset from the electrodes of the lower face. A motor is also provided to include the actuator and a movable element to be driven by means of the actuator.

Abstract: A piezoelectric rotary drive for a shaft, is disclosed which can include a piezoelectric actuator and a coupling portion for driving the shaft as a stick-slip drive. To transmit greater contact forces between the frame and the shaft, at least one piezoelectric actuator and an adjustable and/or deformable frame with at least one coupling portion can be coupled to the shaft in a force-locked manner so as to accomplish a stick-slip drive, wherein the frame translates a piezoelectric deformation of the actuator mechanically such that the coupling portion rotates about the axis of the shaft over at least a part of the circumference of the shaft.

Abstract: The invention relates to a method and to an arrangement for operating a dynamic nano focusing system for use thereof in the field of microscopy, interferometry or similar applications, wherein the nano focusing system comprises a lever-transmission piezo actuator and a frictionless guide based on a resiliently deformable solid body joint which is connected to a mounting unit, in particular for a lens, in order to implement the desired adjustment paths for the focusing. According to the invention, in order to increase the dynamics during the focusing process, a secondary fine adjustment movement is superimposed on the primary adjustment movement, said secondary fine adjustment movement having a smaller adjustment path but higher frequency than the primary adjustment movement, wherein, when the fine adjustment is carried out, a determination is made as to whether the focusing result changes, in order to specify according thereto the amount and/or the direction of the primary adjustment movement.

Abstract: Ultrasonic actuator (1) for a linear ultrasonic motor for driving a positioning element (7), which is pressed along at least one friction track (8) with a predefined force (F) in the ultrasonic motor to effect a linear movement thereof, wherein the ultrasonic actuator (1) comprises: at least one primary waveguide resonator (2), with each of which one primary generator (3) is in flat contact in order to form an acoustic standing wave, at least one auxiliary waveguide resonator (4), with each of which one auxiliary generator is in contact in order to form an acoustic standing wave at least one crosspiece (6), wherein each of the at least one crosspieces (6) connects one of the at least one primary waveguide resonators (2) and one of the at least one auxiliary waveguide resonators (4) to each other at least in sections, and wherein at least one friction track (8) or friction rail (41) is arranged on the crosspiece (6) wherein the at least one primary waveguide resonator (2) and the at least one auxiliary wav

Abstract: The invention relates to a high-resolution positioning device having a stator and a rotor, a coil array, arranged on the stator, having at least three groups of flat coils, wherein each group has at least two single coils and the coil array encloses a free space on the stator, also having permanent magnetically-excited circuits that are situated on, against or in the rotor and form a magnet array which likewise encloses a free space, wherein the free spaces accommodate a position measuring system which has a measuring head having sensors, and an area scale. According to the invention, the device is in the form of a freely suspended, magnetically controlled six-dimensional drive, wherein the measuring head is situated in the coil array free space and the area scale is situated in the magnet array free space, and the rotor is free of drive-related electrical or electronic and, in this regard, live parts.

Abstract: An ultrasonic motor is described. The ultrasonic motor includes a plurality of plate-shaped piezoelectric ultrasonic actuators. Each of the ultrasonic actuators includes at least one friction element allocated thereto. Each ultrasonic actuator or each of one or more pairs of ultrasonic actuators is assigned an element to be driven. The ultrasonic motor also includes a housing. The ultrasonic motor also includes an electric excitation device. The elements to be driven are movable independently of each other, and each ultrasonic actuator or each of the one or more pairs of ultrasonic actuators is arranged in a holder. The holders are pressed against each other by housing side covers. The friction elements on the ultrasonic actuators are pressed against a friction layer of the corresponding element to be driven by an elastic interlayer that is in contact with edge surfaces of the ultrasonic actuators that are arranged opposite the friction elements.

Abstract: A piezoelectric actuator, especially for an ultrasonic motor, includes an acoustic oscillation resonator, wherein the acoustic oscillation resonator is substantially formed as a rectangular piezoelectric plate with two main surfaces, two side surfaces and two end faces and has a multilayer structure in its interior which represents a layer of excitation electrodes taking turns with the layers of the common electrodes and the layers of polarized ceramic provided therebetween, with the polarization vector extending perpendicularly with respect to the surface of the electrodes, wherein all excitation electrodes are divided into two groups not connected to each other, which are disposed symmetrically with respect to the symmetry surface of the aforementioned plate, wherein this symmetry surface extends perpendicularly with respect to the main and side surfaces of the plate, namely through the center thereof.

Abstract: The invention relates to a method for electrically exciting a piezoelectric actuator of an ultrasonic motor having a mechanical resonance frequency Fm, wherein the ultrasonic motor has at least one acoustic standing wave generator, which comprises an exciter electrode and a general electrode, wherein a capacitance Co is developed between the exciter electrode and the general electrode.

Abstract: The invention relates to an ultrasonic actuator, preferably for use in an ultrasonic motor, in the form of a piezoelectric plate with a length L, height H and thickness t, wherein the piezoelectric plate has a lateral plane of symmetry Sq, a longitudinal plane of symmetry Sl and at least two main surfaces, and the piezoelectric plate comprises at least two generators symmetrically disposed with respect to plane of symmetry Sq for generating ultrasonic standing waves.

Abstract: Operating method of a piezolinear drive having a group of piezo stack actuators which drive a rotor, in which the actuators constitute a multilayer ceramic arrangement situated on a common substrate, wherein a first stack part within the stack of the multilayer arrangement is formed as a longitudinal actuator, and a second stack part as a shearing actuator, and the latter being at least indirectly in clamping and shearing contact with the rotor, and at least two identical actuators being situated next to each other in order to perform alternate clamping and advancing movements in the step operation for a rough positioning operation in the step mode, wherein the adjacent actuators of the group are controlled to perform alternate clamping and advancing movements, with control signals being derived from a speed-proportional control variable.

Abstract: An actuator, which can include piezoelectric material, is provided in the form of a single-layer or multi-layer flat plate. At least one layer has two electrodes spaced from each other by means of a separating area and arranged opposite each other both on the upper face of the at least one layer and on the lower face of the at least one layer. The electrodes of the upper face are arranged at an offset from the electrodes of the lower face. A motor is also provided to include the actuator and a movable element to be driven by means of the actuator.

Abstract: An exemplary actuator in the form of a plate is disclosed, which includes, at least two generators for exciting an acoustic standing wave in the actuator. The actuator can have at least two main surfaces and a plane of symmetry S running perpendicularly to the main surfaces, with respect to which the generators are arranged symmetrically. A first lateral surface area can have a length L that substantially corresponds to the wavelength of the acoustic standing wave excited in the actuator. A second lateral surface area of the actuator can have a length (B) that is greater than the wavelength of the acoustic standing wave excited in the actuator, and that is not equal to a multiple of half the wavelength of the excited acoustic standing wave.

Abstract: The invention relates to an ultrasonic linear drive unit comprising a driving element as an ultrasonic oscillator with two generators for ultrasonic vibrations and a driven element that forms a frictional contact with the driving element, and an electrical excitation source for the driving element. According to the invention, the ultrasonic oscillator is designed as a hollow thin-walled piezoelectric cylinder, the height H of which is identical to or smaller than the mean diameter D thereof. The generators for ultrasonic vibrations are symmetrically disposed on both sides relative to the sectional plane S that extends through the center of the height of the ultrasonic oscillator, perpendicular to the longitudinal axis L thereof. The cylinder surface of the driving element is in contact with the driven element, and the electrical excitation source is connected to the ultrasonic linear drive unit in such a way that the drive unit excites only the first or the second generator for ultrasonic vibrations.

Abstract: The invention relates to an ultrasonic motor having a multilayer actuator in the form of a multilayer plate, having one or more friction elements or friction layers on its side surfaces and having an electrical exciter apparatus for the actuator. According to the invention, the multilayer plate has two intersecting, mirror-imaged asymmetrical generators for ultrasonic vibrations, to be precise in the form of layers of exciter electrodes and general electrodes which are alternately arranged with layers of piezoelectric ceramic, wherein a two-dimensional asymmetrical acoustic standing wave is generated in the multilayer actuator.

Abstract: Operating method of a piezolinear drive having a group of piezo stack actuators which drive a rotor, in which the actuators constitute a multilayer ceramic arrangement situated on a common substrate, wherein a first stack part within the stack of the multilayer arrangement is formed as a longitudinal actuator, and a second stack part as a shearing actuator, and the latter being at least indirectly in clamping and shearing contact with the rotor, and at least two identical actuators being situated next to each other in order to perform alternate clamping and advancing movements in the step operation for a rough positioning operation in the step mode, wherein the adjacent actuators of the group are controlled to perform alternate clamping and advancing movements, with control signals being derived from a speed-proportional control variable.

Abstract: The invention relates to a miniaturizable motor (1) comprising a rotor (12) that is driven by a hollow cylindrical piezo oscillator (2). Said rotor is effectively connected to a frictional face (13) of the piezo oscillator while a main electrode or counter electrode (3) and excitation electrodes (4, 5, 6) are disposed on the surface of the hollow cylinder. The hollow cylindrical piezo oscillator is made of a monocrystalline material with a trigonal crystal system which is provided with three main electrical axes that are placed at a 120° angle relative to each other as well as an optical axis. Said optical axis encloses a 90° angle along with the point of intersection of the electrical axes while coinciding with the longitudinal axis of the hollow cylindrical piezo oscillator. Furthermore, the axial axis of symmetry of the respective excitation electrode intersects one of the main electrical axes while said axial axis of symmetry extends parallel to the optical axis.

Abstract: The invention relates to an ultrasound linear piezoelectric motor comprising an ultrasound oscillator (1) embodied in the form of a piezoelectric plate (4) or a cylinder shell part (3), acoustic oscillation generators (5) and a friction element (6) which frictionally interacts with a driven element (8) and is disposed in a holder. The inventive holder is embodied in the form of an elastic clamp (13) which embraces a driven element, is fixed to the ultrasound oscillator and made of a sound-conducting material.

Abstract: The invention relates to an objective module comprising an optical zoom lens group (2) and a focusing optical lens group (4), the combined optical axes forming the optical axis (7) of the objective, and an electrical drive for the two lens groups. According to the invention, the electrical drive of the cited lens groups is embodied in the form of two linear ultrasonic motors (9, 11), each of the two ultrasonic motors consisting of a piezoelectric plate (12) comprising two friction elements (14) which are pressed against the opposing front sides and form the mobile elements of the ultrasonic motors together with the pressure elements (15). Each of the mobile elements is elastically connected to the corresponding lens group. The ultrasonic motors are arranged in such a way that the direction of displacement of the mobile elements is parallel to the optical axis of the optical module.

Abstract: The invention relates to an ultrasonic linear motor (1) comprising a plate-type ultrasonic oscillator (2) with two planar parallel main faces, two end faces and two lateral faces and a displaceable element (9) that engages with at least one guide rail (10) and has two friction parts, said element interacting with the ultrasonic oscillator to cause friction via the lateral faces of the friction parts. The lateral faces of the ultrasonic oscillator are planar and are inclined at the same angle in relation to a longitudinal plane of symmetry, in such a way that the intersection lines between the planes of the lateral faces and the longitudinal plane of symmetry run parallel to the main faces of the ultrasonic oscillator. The friction parts of the displaceable element are interconnected by springs.

Abstract: The invention relates to an adjusting device with high position resolution, even in the nano- or subnanometer range and a regulating distance of a few micrometers up to several hundred millimeters, wherein PZT-solid state actuators in a closed-loop control circuit are used for the main control direction, the positions thereof being determined by high resolution sensors and the PZT-solid state actuators are in connection with a platform (2) via joints. For the compensation of position errors occurring perpendicular to the individual position, additional actuators (5) on the basis of piezoelectric single crystals are intended according to the invention. The single crystals are actuated according to stored values in an error table, wherein the respective control value results as a function of the main control axis, however with reversed gradient signs, and the additional actuators are connected to the adjusting device platform by a correcting plate (4).