Abstract: The invention relates to a piezoelectric positioning element having a micrometer screw, which is combined with a piezotranslator via an intermediate part that is adjustable in length. The stationary portion and the piezoelectrically adjustable portion of the intermediate part are joined to one another by means of a parallel spring guide. The translator may also be made of an electrostrictive or magnetostrictive material.
Type:
Grant
Filed:
September 17, 1987
Date of Patent:
May 30, 1989
Assignee:
Physik Instrumente (PI) GmbH Produktions & Marketing KG