Patents Assigned to Picosun Oy
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Patent number: 11970774Abstract: A deposition or cleaning apparatus comprising an outer vacuum chamber and a reaction chamber inside the outer chamber forming a double chamber structure. The reaction chamber is configured to move between a processing position and a lowered position inside the outer vacuum chamber, the lowered position being for loading one or more substrates into the reaction chamber.Type: GrantFiled: February 2, 2023Date of Patent: April 30, 2024Assignee: Picosun OyInventor: Timo Malinen
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Publication number: 20240084449Abstract: Precursor container, comprising a first volume formed by a first chamber to house precursor material, a second volume formed by a second chamber and separated from the first volume by a partition wall, and a conduit passing through the partition wall and extending from the first volume to the second volume providing the precursor material housed within the first volume with a route to the second volume following a pressure increase in the first volume. The partition wall is a gas-permeable wall allowing gas from the first volume to permeate to the second volume.Type: ApplicationFiled: November 21, 2023Publication date: March 14, 2024Applicant: Picosun OyInventor: Tom BLOMBERG
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Patent number: 11873558Abstract: Precursor container, comprising a first volume formed by a first chamber to house precursor material, a second volume formed by a second chamber and separated from the first volume by a partition wall, and a conduit passing through the partition wall and extending from the first volume to the second volume providing the precursor material housed within the first volume with a route to the second volume following a pressure increase in the first volume. The partition wall is a gas-permeable wall allowing gas from the first volume to permeate to the second volume.Type: GrantFiled: September 6, 2022Date of Patent: January 16, 2024Assignee: Picosun OyInventor: Tom Blomberg
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Publication number: 20230383404Abstract: An apparatus, a method and a valve with a reactive chemical inlet, a reaction chamber outlet, and a closure having an open and closed configuration to open and close, respectively, a route from the reactive chemical inlet to the reaction chamber outlet, the valve further including an additional cleaning chemical inlet at a downstream side of the closure to purge the closure.Type: ApplicationFiled: August 9, 2023Publication date: November 30, 2023Applicant: Picosun OyInventor: Marko PUDAS
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Patent number: 11761082Abstract: An apparatus, a method and a valve with a reactive chemical inlet, a reaction chamber outlet, and a closure having an open and closed configuration to open and close, respectively, a route from the reactive chemical inlet to the reaction chamber outlet, the valve further including an additional cleaning chemical inlet at a downstream side of the closure to purge the closure.Type: GrantFiled: May 2, 2017Date of Patent: September 19, 2023Assignee: Picosun OyInventor: Marko Pudas
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Patent number: 11759100Abstract: A method for cleaning a medical instrument and for detecting residue thereon is provided in which method a non-sterile or conventionally sterilized medical instrument is exposed to pressure below 100 hPa, and, subsequently, exposed to at least one gas reactive to the residue.Type: GrantFiled: March 26, 2020Date of Patent: September 19, 2023Assignee: PICOSUN OYInventor: Marko Pudas
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Patent number: 11738121Abstract: A biocompatible medical device is provided having at least one surface, wherein at least a part of this surface is coated with a biocompatible layer configured to provide visibility of the device in X-rays.Type: GrantFiled: March 27, 2020Date of Patent: August 29, 2023Assignee: PICOSUN OYInventors: Juhana Kostamo, Mikko Matvejeff, Xiaopeng Wu
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Patent number: 11730558Abstract: A medical instrument, including an atomic layer deposition, ALD, coating to indicate the type of the medical instrument, and use of ALD to indicate number of re-uses of a medical instrument.Type: GrantFiled: March 27, 2020Date of Patent: August 22, 2023Assignee: Picosun OyInventors: Jani Kivioja, Niku Oksala
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Patent number: 11725279Abstract: A deposition or cleaning apparatus including an outer vacuum chamber and a reaction chamber inside the outer chamber forming a double chamber structure.Type: GrantFiled: February 8, 2017Date of Patent: August 15, 2023Assignee: Picosun OyInventor: Timo Malinen
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Publication number: 20230227974Abstract: A substrate processing apparatus, includes a reaction chamber, a central processing volume within a vertically oriented central processing portion of the reaction chamber, to expose at least one substrate to self-limiting surface reactions in the central processing volume, at least two lateral extensions in the reaction chamber laterally extending from the central processing portion, and an actuator configured to reversibly move at least one substrate between the lateral extension(s) and the central processing volume.Type: ApplicationFiled: June 11, 2021Publication date: July 20, 2023Applicant: Picosun OyInventor: Marko PUDAS
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Publication number: 20230193461Abstract: A deposition or cleaning apparatus comprising an outer vacuum chamber and a reaction chamber inside the outer chamber forming a double chamber structure. The reaction chamber is configured to move between a processing position and a lowered position inside the outer vacuum chamber, the lowered position being for loading one or more substrates into the reaction chamber.Type: ApplicationFiled: February 2, 2023Publication date: June 22, 2023Applicant: Picosun OyInventor: Timo MALINEN
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Patent number: 11668005Abstract: A method for manufacturing a coated item 10 in a chemical deposition reactor and a coated item produced by the method are provided. The method includes deposition of a first coating on a first surface of the item 10, and/or deposition of a second coating on a second surface of the item.Type: GrantFiled: June 5, 2020Date of Patent: June 6, 2023Assignee: PICOSUN OYInventors: Jani Kivioja, Marko Pudas
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Patent number: 11668004Abstract: A method for coating a vaporizing substrate includes depositing a film coating 12 on at least a part of a substrate 10 during the time when the substrate undergoes phase transition from essentially liquid phase to gaseous phase, where the substrate includes a chemical substance that participates in chemical deposition reaction(s) in gaseous phase, the gaseous species 101 formed upon vaporizing at least the portion of the substrate material, when undergoing chemical deposition reactions in gaseous phase, produce particulate 11 that forms at least one coating layer to produce the film coating 12.Type: GrantFiled: March 27, 2020Date of Patent: June 6, 2023Assignee: PICOSUN OYInventors: Marko Pudas, Niku Oksala
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Publication number: 20230090809Abstract: A fluid inlet assembly for a substrate processing apparatus includes a fluid inlet pipe configured to pass through a wall of a sealed pressure vessel, a resilient element around the fluid inlet pipe outside the sealed pressure vessel coupling the fluid inlet pipe to the wall, and first and second end parts, the resilient element being coupled therebetween.Type: ApplicationFiled: November 21, 2022Publication date: March 23, 2023Applicant: Picosun OyInventors: Timo MALINEN, Väinö KILPI, Marko PUDAS
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Publication number: 20230076675Abstract: Precursor container, comprising a first volume formed by a first chamber to house precursor material, a second volume formed by a second chamber and separated from the first volume by a partition wall, and a conduit passing through the partition wall and extending from the first volume to the second volume providing the precursor material housed within the first volume with a route to the second volume following a pressure increase in the first volume. The partition wall is a gas-permeable wall allowing gas from the first volume to permeate to the second volume.Type: ApplicationFiled: September 6, 2022Publication date: March 9, 2023Applicant: Picosun OyInventor: Tom BLOMBERG
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Publication number: 20230067579Abstract: A substrate processing apparatus includes an inner chamber formed by an upper portion and a lower portion, a substrate support to support a substrate within the upper portion of the inner chamber, a plasma system to provide the inner chamber with plasma species from the top side of the inner chamber, and an outer chamber surrounding the upper portion of the inner chamber. The lower portion of the inner chamber extends to the outside of the outer chamber and remains uncovered by the outer chamber.Type: ApplicationFiled: December 21, 2020Publication date: March 2, 2023Applicant: Picosun OyInventor: Väinö KILPI
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Publication number: 20230024132Abstract: A substrate processing apparatus, including a reaction chamber enclosing a substrate processing space and a chemical exit space, further including a substrate support. The apparatus is configured to direct a chemical flow into the substrate processing space, to expose a substrate supported by the substrate support to surface reactions, therefrom via a first gap into a first expansion volume of the chemical exit space, and therefrom via a second gap towards an exhaust pump, the apparatus being configured to provide the chemical flow with a choked flow effect in at least one of the first and second gaps.Type: ApplicationFiled: December 22, 2020Publication date: January 26, 2023Applicant: Picosun OyInventor: Marko PUDAS
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Publication number: 20220403514Abstract: A substrate processing apparatus, including a reaction chamber to process a substrate, a photon source to provide the reaction chamber with photons from the top side of the reaction chamber, a substrate support to support the substrate, a chemical inlet to provide the reaction chamber with a reactive chemical; and a chemical outlet to exhaust gases from the reaction chamber, the chemical outlet including a surface separating the reaction chamber from a surrounding space.Type: ApplicationFiled: November 25, 2020Publication date: December 22, 2022Applicant: Picosun OyInventors: Timo VÄHÄ-OJALA, Väinö KILPI, Niklas HOLM, Timo MALINEN
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Patent number: 11505864Abstract: A substrate processing apparatus, includes a sealed pressure vessel, such as an Atomic Layer Deposition, ALD, apparatus, a fluid inlet assembly attached to a wall of the sealed pressure vessel, the fluid inlet assembly having a fluid inlet pipe passing through the wall, and a resilient element in the fluid inlet assembly around the fluid inlet pipe coupling the inlet pipe to the wall, where one of an interior surface and an exterior surface of the resilient element sees pressure prevailing within the pressure vessel and the other sees ambient pressure, and where the fluid inlet pipe prevents fluid carried inside from being in contact with the resilient element, and a relating method.Type: GrantFiled: June 21, 2017Date of Patent: November 22, 2022Assignee: Picosun OyInventors: Timo Malinen, Väinö Kilpi, Marko Pudas
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Publication number: 20220356575Abstract: A substrate processing apparatus (100), comprising a reaction chamber (20) having an upper portion (20a) and a lower portion (20b) sealing an inner volume of the reaction chamber (20) for substrate processing, the lower portion (20b) being movable apart from the upper portion (20a) to form a substrate loading gap therebetween, a substrate support system comprising a support table (31) and at least one support element (70) vertically movable in relation to the support table (31) and extending through the support table (31) to receive a substrate within the reaction chamber (20), and a stopper (90) stopping a downward movement of the at least one support element (70) at a substrate loading level.Type: ApplicationFiled: May 2, 2022Publication date: November 10, 2022Applicant: Picosun OyInventors: Väinö KILPI, Tom BLOMBERG