Abstract: A method for manufacturing a semiconductor structure with reduced bowing for applications in the field of power electronics, photonics, optoelectronics, solar energy conversion and the like, which comprises: a step of providing at least a first layer of a first semiconductor material, said first layer comprising a substrate of said first semiconductor material, which extends along a first reference plane, and a plurality of first portions of said first semiconductor material, which are mutually spaced and extend in elevation from said substrate along axes perpendicular to said first reference plane, said first portions having ends in distal position with respect to said substrate; a step of providing at least a second layer of a second semiconductor material, said second layer comprising second portions of said second semiconductor material, each of which is joined to the ends of a plurality of said first portions, said second portions being mutually spaced and extending along a second reference plane paralle

Abstract: Structures and methods for producing active layer stacks of lattice matched, lattice mismatched and thermally mismatched semiconductor materials, with low threading dislocation densities, no layer cracking and minimized wafer bowing, by using epitaxial growth onto elevated substrate regions in a mask-less process.