Abstract: For detection of the inclination of the normal of a measurement-subject article, an auto-collimator applies a laser beam from a light source onto the measurement-subject article. Then, the return light reflected back from the measurement-subject article is concentrated by a convex lens. Further the return light is converted to parallel light by a concave lens and then projected onto a first screen. The auto-collimator is provided with a beam splitter provided between the convex lens and the concave lens for splitting off a portion of the return light traveling back from the measurement-subject article, and a coarse-adjustment verification screen for showing the split-off light split off from the return light by the beam splitter.

Abstract: For detection of the inclination of the normal of a measurement-subject article, an auto-collimator applies a laser beam from a light source onto the measurement-subject article. Then, the return light reflected back from the measurement-subject article is concentrated by a convex lens. Further the return light is converted to parallel light by a concave lens and then projected onto a first screen. The auto-collimator is provided with a beam splitter provided between the convex lens and the concave lens for splitting off a portion of the return light traveling back from the measurement-subject article, and a coarse-adjustment verification screen for showing the split-off light split off from the return light by the beam splitter.

Abstract: A resist pattern in accordance with a predetermined pattern is formed on a substrate. Next, a bump resist mixed with a micro metallic powder is made thicker than the resist pattern and formed on the substrate formed with the resist pattern. Continuously, the bump resist on the resist pattern is removed in the bump resist. Next, the resist pattern is removed. As a result, a bump resist pattern corresponding to the predetermined pattern remains on the substrate. Furthermore, the resist component in this bump resist pattern is removed, thereby forming a micro bump (micro projecting electrode) 8 consisting of the micro metallic powder on the substrate.

Abstract: A light receiving unit 20A has a half mirror 20Aa and a photoreceptor device 20Af. A signal processing member 20B generates a focus error signal e from photoelectric conversion signals a, b, c and d which are outputted from the light receiving unit 20A, and further generates a focus error signal e1 from photoelectric conversion signals a1, b1, c1 and d1 which are outputted from a photoreceptor device 7 of an optical pickup P subject to adjustment. A control member 20C performs attitude control on an actuator 5A of an objective lens of the optical pickup P based on the focus error signal e, and creates data for adjusting the optical pickup P based on the focus error signal e1.