Abstract: After a transfer material was hardened in a situation an imprint mold which has a concave part pattern is forced against the liquid transfer material, a replica which has a convex part pattern corresponding to the concave part pattern by releasing the imprint mold. A pressurization mechanism and a vacuum pump are set, regarding depth K of the concave part pattern of the imprint mold, height k of the convex part pattern of the transfer material, effective pressure Mo while the imprint mold is forced, pressure P in the space, with satisfying: Mo/P?k/(K?k). With this arrangement, even if air comes inside of the concave part pattern of the imprint mold and is stuffed in the inside, it is possible to have transcription with no problem.