Patents Assigned to Plansee Japan Ltd.
  • Blind-vented electrode
    Patent number: 10256003
    Abstract: A vented electrode that provides a directional stop to prevent energetic particles and secondaries (i.e., secondary electrons, charged particles, photons) generated in the vent channel from reaching into a gap outside of the electrode plate. For example, ventilation is added to at least one electrode, via vented inserts, wherein the vents do not provide a direct line of sight from at least one side of the electrode plate to the other.
    Type: Grant
    Filed: January 31, 2017
    Date of Patent: April 9, 2019
    Assignee: Plansee Japan Ltd.
    Inventor: Noboru Shirozu