Abstract: A facility for purifying harmful gas disposing harmful gas discharged from at least one process chamber in which processes are performed in the vacuum status by a vacuum pump, the facility including: one or a plurality of microwave generators generating microwave; a plurality of wave guides including a wave path through which the microwave generated by the microwave generator is provided; a plasma discharge chamber including the wave guides connected by a certain distance along the harmful gas flow direction outside; and a shield installed inside the plasma discharge chamber preventing ions or electrons for the plasma discharge from leaking outside by contacting with the plasma discharge chamber.

Abstract: A facility for purifying harmful gas according to an exemplary embodiment of the inventive concept includes a vacuum pump for discharging harmful gas generated from the process chamber, preprocessing apparatus a preprocessing apparatus with which buffer gas for plasma discharge is provided together with the harmful gas discharged from the process chamber and performing preprocess such that noxious substances in the harmful gas and the buffer gas may be activated by emitting microwave, and a plasma reactor receiving the harmful gas including activated noxious substances and the activated buffer gas from the preprocessing apparatus and decomposing the activated substances by generating plasma discharge.

Abstract: To prepare a thermally sprayed composite material, a precomposited powder is first prepared and then thermally sprayed at an ambient pressure of no less than about 0.75 atmosphere in an oxidation-preventing atmosphere. The precomposited powder has a plurality of powder particles, and each powder particle is formed of a matrix and reinforcing particles distributed within and encapsulated by the matrix. The matrix has a composition of a matrix metal such as molybdenum, hafnium, zirconium titanium, vanadium, niobium, tantalum, or tungsten, and a matrix non-metal of silicon, boron, or carbon. The reinforcement particle is silicon carbide, boron carbide, silicon nitride, or boron nitride.

Abstract: A mass of molybdenum disilicide-silicon carbide composite material is prepared by providing a mixture of molybdenum disilicide-silicon carbide precomposited powder, and plasma spraying the precomposited powder onto a substrate using argon-shrouded plasma spray deposition, to form a plasma-sprayed mass. The plasma-sprayed mass may be subsequently heat treated.

Abstract: Plasma energy recycle and conversion (PERC) reactor and process for disposal of energetics such as solid rocket propellants, liquid rocket fuel, chemical agents such as nerve gas, industrial waste such as paint sludge, medical waste or any aqueous/organic liquid or slurry that is pumpable and for separation/consolidation/conversion of low-level radioactive waste or mixed waste incorporating an induction coupled plasma heat source, insulated primary and secondary reaction chambers and associated peripheral control, process and filter devices.

Abstract: Steam plasma reactor incorporating an induction steam plasma torch where superheated steam is generated and passed through an induction coil or coils to generate high temperature steam plasma for conversion and disposal of waste products such as low level radioactive waste, energetics, such as solid rocket propellants, liquid rocket fuel, chemical agents such as nerve gas, industrial waste such as paint sludge, hazardous chemical waste, medical waste and other general wastes in a downstream conversion reactor referred to as a plasma energy recycle and conversion (PERC) reactor.