Abstract: The invention relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, which includes a rotor member which forms the pump-active surface of the molecular pump stage and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the rotor elements of the side channel pump stage are supported by the rotor member of the molecular pump stage. The invention further relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the side channel pump stage is arranged between a pump inlet and the molecular pump stage.
Type:
Grant
Filed:
February 14, 2013
Date of Patent:
August 23, 2016
Assignee:
Pleiffer Vacuum GmbH
Inventors:
Aleksandr Shirinov, Tobias Stoll, Michael Schweighoefer, Jan Hofmann