Abstract: The present invention relates to a method for manufacturing micro/nanofluidic devices that incorporate overhanging micromechanical and metal components monolithically integrated with the fluidic circuitry.
Type:
Grant
Filed:
May 22, 2007
Date of Patent:
August 13, 2013
Assignee:
Poc Microsolutions, S.L.
Inventors:
Francisco Javier Blanco Barrio, Maria Aguirregabiria Izaguirre, Aitor Ezkerra Fernandez, Janette Lilian Maria Schulze, Jesús Miguel Ruano Lopez, Kepa Mayora Oria