Abstract: An embodiment of the present inventions provides a method for preconditioning a semiconductor fabrication component using a plasma etching process and an optional enhanced ultrasonic and/or megasonic preconditioning step in order to eliminate the need for a burn-in period typically associated with said components, as well as extend the useful life of the component during its wear-out phase.

Abstract: In an embodiment of the invention, a tong assembly for handling glass articles such as bottles, jars, and the like during the manufacture of same, utilizes replaceable matched pairs of components that vertically seat and are captured on features on the pair of tongs. The components may be in an interlocking, gravity restrained engagement and that may be replaced by lifting the components out of their interlocking engagement, removing them and replacing same by lowering the replacement components into the interlocking engagement whereby the replacement components are then captured and constrained by pairs of engagement surfaces. Lowering may be by lowering the entirety of the insert or lowering a portion such as the component is rotated into seating engagement. The components may be inserts held in place with the resiliency of spring clips that are themselves retained on the inserts also by the spring clips resiliency.

Abstract: A method of producing a densified SiC article is provided. Near-net shape porous silicon carbide articles are produced and densified using the developed method. A substantial number of pores within the porous near-net shape silicon carbide article are filled (impregnated) with a carbon precursor, a silicon carbide precursor, or a mixture of both. The carbon precursor can be liquid or gas. The filled SiC preform is heated to convert the carbon or silicon carbide precursor to porous carbon or SiC preform inside the pores of the net-shape silicon carbide article. The impregnation/pyrolysis cycle is repeated until the desired amount of carbon and/or silicon carbide is achieved. In case of a carbon or a mixture of silicon carbide/carbon precursor is used, the pyrolyzed near-net shape silicon carbide article is then contacted with silicon in an inert atmosphere.

Abstract: An embodiment of the present inventions provides a method for preconditioning a semiconductor fabrication component using a plasma etching process and an optional enhanced ultrasonic and/or megasonic preconditioning step in order to eliminate the need for a burn-in period typically associated with said components, as well as extend the useful life of the component during its wear-out phase.

Abstract: A process for converting precursor objects into a unitary ceramic object produces, for example, a ceramic, optical scan mirror that is formed from at least two pieces. An optical section has at least one optical surface and at least one attachment surface, and a support section has at least one attachment surface and preferably has a mounting area. The optical and support sections are formed as separate pieces from a precursor material, such as graphite, such that a selected support section can receive any of a plurality of optical sections having different sizes, shapes, or orientations. To form the mirror, the attachment surfaces are placed adjacent each other, and then the sections are converted simultaneously to a ceramic material, such as silicon carbide, to form a monolithic scan mirror.

Abstract: An adjustable stacker bar assembly includes a pad assembly having a lower pad that is mounted to a push bar. The lower pad is in direct contact with and independently mounted to the push bar. An upper pad is mounted to and spaced apart from the lower pad by a spacer. The spacer is free of contact with the push bar. The pads contact and push glass articles into an annealing furnace. The entire pad assembly is readily vertically movable relative to the push bar in the event that a workpiece is lodged beneath the lower pad.

Abstract: A method of producing a densified SiC article is provided. Near-net shape porous silicon carbide articles are produced and densified using the developed method. A substantial number of pores within the porous near-net shape silicon carbide article are filled (impregnated) with a carbon precursor, a silicon carbide precursor, or a mixture of both. The carbon precursor can be liquid or gas. The filled SiC preform is heated to convert the carbon or silicon carbide precursor to porous carbon or SiC preform inside the pores of the net-shape silicon carbide article. The impregnation/pyrolysis cycle is repeated until the desired amount of carbon and/or silicon carbide is achieved. In case of a carbon or a mixture of silicon carbide/carbon precursor is used, the pyrolyzed near-net shape silicon carbide article is then contacted with silicon in an inert atmosphere.

Abstract: An adjustable stacker bar assembly includes a pad assembly having a lower pad that is mounted to a push bar. The lower pad is in direct contact with and independently mounted to the push bar. An upper pad is mounted to and spaced apart from the lower pad by a spacer. The spacer is free of contact with the push bar. The pads contact and push glass articles into an annealing furnace.

Abstract: A takeout jaw for handling glass bottles includes a holder for both fixed and floating inserts. This design allows an insert to be in a fixed position when the insert is provided with a nominal thickness. When a floating insert of a lesser thickness is installed, the spring clip does not engage the floating insert, which allows the floating insert to move vertically or float. The takeout holder contains either type of insert within the pocket with retaining clips that engage chamfers formed on the inserts.

Abstract: A process for converting precursor objects into a unitary ceramic object produces, for example, a ceramic, optical scan mirror that is formed from at least two pieces. An optical section has at least one optical surface and at least one attachment surface, and a support section has at least one attachment surface and preferably has a mounting area. The optical and support sections are formed as separate pieces from a precursor material, such as graphite, such that a selected support section can receive any of a plurality of optical sections having different sizes, shapes, or orientations. To form the mirror, the attachment surfaces are placed adjacent each other, and then the sections are converted simultaneously to a ceramic material, such as silicon carbide, to form a monolithic scan mirror.

Abstract: A system conveys two gases separately until controlled delivery and gas mixing are desired. The device maintains separation between the two gases with sealed, high temperature materials, and a geometry that contains gas flow channels that do not allow gas mixing. The present design provides a seal at the interfaces between components. An outer ring and an inner spool are assembled together to form a single component that accommodates the input of two, initially separate gases, and then contains and conveys the two gases separately to an exit surface where outlet holes allow the two gases to mix and react in a controlled manner upon exiting the component. The inlet holes for both gases are located on one side of the spool. The exit holes are formed in a centralized, alternating, completely interspersed array or grid-like pattern on the opposite surface of the spool.

Abstract: A system conveys two gases separately until controlled delivery and gas mixing are desired. The device maintains separation between the two gases with sealed, high temperature materials, and a geometry that contains gas flow channels that do not allow gas mixing. The present design provides a seal at the interfaces between components. An outer ring and an inner spool are assembled together to form a single component that accommodates the input of two, initially separate gases, and then contains and conveys the two gases separately to an exit surface where outlet holes allow the two gases to mix and react in a controlled manner upon exiting the component. The inlet holes for both gases are located on one side of the spool. The exit holes are formed in a centralized, alternating, completely interspersed array or grid-like pattern on the opposite surface of the spool.

Abstract: A process for producing solid, porous graphites which provides a more uniform density gradient throughout the ultimate product. The process utilizes a pressure drop during processing in order to induce boiling and varies the processing pressure between an initial pressure which exceeds 1000 psig and a final processing pressure which generally exceeds the initial pressure. The particular processing techniques employed allow additional viscosity manipulation as well as improved density gradient characteristics in the ultimate product. The final products have bulk thermal conductivities in the range from 90-300 W/mK with apparent densities ranging from about 0.678 g/cc-1.

Abstract: A process for producing molded pitch based foam is shown which provides a more uniform density gradient throughout the ultimate product. The process utilizes a pressure drop during processing in order to induce foaming. By inducing foaming through process depressurization, additional viscosity manipulation can be achieved as well as improved density gradient characteristics in the ultimate product.

Abstract: A rotatable sputter target for use in a sputtering system having a sleeve of sputtering material attached to a structural support tube such that an annular space is formed between the inside surface of the sleeve and the outside surface of the support tube. The annular space is at least partly filled with a thermally and electrically conductive material which flows at ambient temperature. The annular space is sealed at either end so that the material cannot escape the annular space.