Abstract: A light irradiation device for irradiating polarized light having a light source, a device-side polarizer for polarizing light of the light source and a measuring device that measures a polarization axis of the light polarized by the device-side polarizer is provided, an extinction ratio of the device-side polarizer being set to 100:1 or more.
Type:
Application
Filed:
February 5, 2015
Publication date:
August 11, 2016
Applicants:
POLARIZATION SOLUTIONS, LLC, IWASAKI ELECTRIC CO., LTD.
Inventors:
Hirokazu Ishitobi, Xuegong Deng, Thomas Wray Tombler, JR.
Abstract: A method includes providing a layer having a plurality of spaced-apart lines of a first material extending along a first direction and forming a line of a second material on opposing surfaces of each line of the first material, the first and second materials being different and adjacent lines of the second material being discontinuous. After forming the lines of the second material, forming pairs of spaced-apart lines of a third material between adjacent pairs of the lines of the second material, wherein each line of the third material is spaced apart from the closest line of the second material and the first and third materials are different.
Type:
Grant
Filed:
November 15, 2010
Date of Patent:
August 12, 2014
Assignee:
Polarization Solutions, LLC
Inventors:
Qihong Wu, Kelvin Xu Zhang, Shiaw-Wen Tai
Abstract: In general, in a first aspect, the invention features a method that includes forming a first layer comprising a first material over a surface of a second layer, wherein forming the first layer includes sequentially forming a plurality of monolayers of the second material over the surface of the second layer, the second layer comprises a plurality of rows of a second material extending along a first direction and spaced from one another in a second direction orthogonal to the first direction, and the first layer conforms to the surface of the second layer.
Type:
Grant
Filed:
March 21, 2008
Date of Patent:
April 29, 2014
Assignee:
Polarization Solutions, LLC
Inventors:
Xuegong Deng, Jian Jim Wang, Lei Chen, Anguel N. Nikolov, Nada O'Brien, Xiaoming Liu
Abstract: Methods for forming a metal grating include providing a first grating including a plurality of grating lines formed from a dielectric material, each grating having a pair of sidewalls, facing sidewalls of adjacent grating lines being separated by corresponding trenches, the grating lines and trenches forming a grating surface; forming a layer of a metal on the grating surface, where the metal layer has a constant thickness and conforms to the grating surface; and removing portions of the metal layer between sidewalls of adjacent grating lines of the first grating to form a metal grating having grating lines formed from the metal, the grating lines of the metal grating corresponding to the portions of the metal layer adjacent the sidewalls of the grating lines of the first grating. The metal grating has a pitch of 200 nm or less, a depth of 50 nm or more, and the grating lines of the metal grating have an aspect ratio of 10-to-1 or more.
Type:
Grant
Filed:
September 21, 2009
Date of Patent:
August 13, 2013
Assignee:
Polarization Solutions, LLC
Inventors:
Qihong Wu, Sheng Liu, Xu Zhang, Shiaw-wen Tai, Xiaohua Du, Thomas Tombler