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Patents
Patents Assigned to Poly-Flow Engineering, LLC
Patents Assigned to Poly-Flow Engineering, LLC
Fixture Drying Apparatus and Method
Publication number:
20100258149
Abstract:
Wafer carrier washing and drying apparatus and method, especially useful for the semiconducting industry.
Type:
Application
Filed:
May 28, 2009
Publication date:
October 14, 2010
Applicant:
Poly-Flow Engineering, LLC
Inventors:
Chris Schneller, Scott Roberts, Kathryn Whitaker, Kevin Ferguson, Stephen Islas, Joe Moore, Jim Puissant