Patents Assigned to Poly-Flow Engineering, LLC
  • Publication number: 20100258149
    Abstract: Wafer carrier washing and drying apparatus and method, especially useful for the semiconducting industry.
    Type: Application
    Filed: May 28, 2009
    Publication date: October 14, 2010
    Applicant: Poly-Flow Engineering, LLC
    Inventors: Chris Schneller, Scott Roberts, Kathryn Whitaker, Kevin Ferguson, Stephen Islas, Joe Moore, Jim Puissant