Patents Assigned to Polygon Physics
  • Plasma source
    Patent number: 10798810
    Abstract: The invention concerns a plasma source including a quarter wave antenna (204) located in a cylindrical enclosure (202) provided with an opening (208) opposite the end of the antenna (204). The diameter (d) of the antenna (204) is in the range from one third to one quarter of the inner diameter (d1) of the enclosure (202). The distance (l) between the end of the antenna (204) and the opening (208) is in the range from ? to 5/3 of the diameter (d) of the antenna (204).
    Type: Grant
    Filed: December 21, 2017
    Date of Patent: October 6, 2020
    Assignee: Polygon Physics
    Inventor: Pascal Sortais