Patents Assigned to Posifa
  • Vacuum-cavity-insulated flow sensors
    Patent number: 9880036
    Abstract: A vacuum-cavity-insulated flow sensor and related fabrication method are described. The sensor comprises a porous silicon wall with numerous vacuum-pores which is created in a silicon substrate, a porous silicon membrane with numerous vacuum-pores which is surrounded and supported by the porous silicon wall, and a cavity with a vacuum-space which is disposed beneath the porous silicon membrane and surrounded by the porous silicon wall. The fabrication method includes porous silicon formation and silicon polishing in HF solution.
    Type: Grant
    Filed: November 5, 2015
    Date of Patent: January 30, 2018
    Assignee: Posifa
    Inventor: Xiang Zheng Tu