Abstract: System and method for laser micro-machining of crystalline and polycrystalline materials such as silicon that produces smooth surfaces. The invention is applied to integrated circuit applications including probing or modification of circuit components, electrical connections through silicon substrates, establishing ground plains within integrated circuits, and connections between circuits developed on opposing sides of a single substrate. Methods involve the use of femtosecond light pulses of short wavelength and circular polarization. A specific fluence region is used to obtain machined surfaces with smoothness to within one micron.
Type:
Grant
Filed:
May 15, 2002
Date of Patent:
January 13, 2004
Assignee:
Positive Light, Inc.
Inventors:
William Michael Tulloch, Alan Reilly Fry, Jeremy Weston, William Eugene White
Abstract: An efficient, powerful and reliable system for amplifying optical pulses. Seed-pulses are generated by a seed-pulse source and are transmitted to an optical amplifier for amplification. The power for the amplification is provided by a Q-switched, diode-pumped, extracavity frequency-doubled pump laser.
Type:
Grant
Filed:
April 16, 1999
Date of Patent:
September 19, 2000
Assignee:
Positive Light, Inc.
Inventors:
Jeremy Weston, William Eugene White, Leigh John Bromley, Frank Godwin Patterson
Abstract: An efficient, powerful and reliable system for amplifying optical pulses. Seed-pulses are generated by a seed-pulse source and are transmitted to an optical amplifier for amplification. The power for the amplification is provided by a Q-switched, diode-pumped, intracavity-doubled pump laser.
Type:
Grant
Filed:
July 29, 1998
Date of Patent:
October 5, 1999
Assignee:
Positive Light, Inc.
Inventors:
Jeremy Weston, William Eugene White, Leigh John Bromley, Frank Godwin Patterson
Abstract: An efficient, powerful and reliable system for amplifying optical pulses. Seed-pulses are generated by a seed-pulse source and are transmitted to an optical amplifier for amplification. The power for the amplification is provided by a Q-switched, diode-pumped, intracavity-doubled pump laser.
Type:
Grant
Filed:
January 23, 1997
Date of Patent:
August 4, 1998
Assignee:
Positive Light, Inc.
Inventors:
Jeremy Weston, William Eugene White, Leigh John Bromley, Frank Godwin Patterson
Abstract: A dispersive laser pulse stretcher and compressor comprises a stretcher portion and a compressor portion. A first mirror, a second mirror, a third mirror, a first grating, a first lens, and a first vertical retroreflector block comprise the stretcher portion. A fourth mirror, a second grating, a horizontal retroreflector, and a second vertical retroreflector block preferably comprise the compressor portion. The input beams for the stretcher and compressor are preferably parallel beams. The present invention also positions the first grating of the stretcher in a parallel plane with the second grating of the compressor.