Abstract: A high energy photon source for generating EUV radiation comprises a nozzle emitting a supersonic stream of source material, a laser or electrical/magnetic pre-ionization mechanism and a laser or electrical/magnetic excitation mechanism and a skimmer plate between them providing a collimated high density beam of source material for excitation.

Abstract: In a solid state, optically end-pumped laser, the laser gain medium has a tapered diameter to minimize the maximum path length of barrelling amplified stimulated emission (ASE), and a roughened surface region at one end to scatter barrelling ASE out of the gain medium; thereby minimizing the negative effective of barrelling ASE's, and inhibiting the trapping of rays with a large longitudinal component, but disallowing a cyclic, i.e. repeated, pass path with specular reflections.

Abstract: A laser is disclosed which includes a gain medium, a switch element, and a pulse controller. In one embodiment laser light of differing polarizations pass along respective paths and a pulsed laser output is generated via an electro-optical element. In another embodiment light of differing polarizations passes in differing directions through a cyclical path. The invention can make use of a prism-shaped polarizer having a polarization selection face and two further faces. Yet further initial pulses can be controlled to reduce energy, for example by progressively increasing the period or amplitude of successive pulses. As a result an efficient and high power laser apparatus is realized.

Abstract: An extreme ultraviolet radiation generator is disclosed in which Xenon gas is continuously ejected from a high pressure nozzle into a low pressure chamber to generate Xenon atom clusters which are irradiated with a high repetition rate pulsed laser to form a plasma and yield quasi-continuous EUV generation. The nozzle has a beveled outer rim to enable the focus point of the laser light to be brought close to the nozzle. The nozzle is cooled to a temperature at which background Xenon gas condenses onto the nozzle forming a protective layer. A gas compressor serves to recirculate the Xenon gas and batch purification triggered by a mass spectrometer monitoring gas purity may be periodically applied.