Patents Assigned to PPM Pure Metals GmbH
  • Production of phenylarsines
    Patent number: 5004821
    Abstract: Organic metallic compounds in the form of phenylarsines are used in epitaxy processes, such as MO-VPE. MO-CVD or MOMBE processes, as well as for ion implantation or the in-situ doping of polysilicon for semi-conductors.
    Type: Grant
    Filed: December 27, 1989
    Date of Patent: April 2, 1991
    Assignee: PPM Pure Metals GmbH
    Inventor: Hartmut Hofmann