Abstract: A micromirror which comprises a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis; a first comb drive which has a first position fixed relative to the mirror and second portion fixed relative to the mount. The first comb drive being for actuating the mirror about the first axis. A weight connected to the mirror, and the weight and mirror being on opposite sides of a fulcrum of the first pivoting structure. The first axis is non-parallel to a longitudinal axis extending through the weight and the mirror.

Abstract: A Light Detection and Ranging (LiDAR) system, comprising: a light emitting unit comprising a light source comprising one or more laser emitters for generating one or more laser beams for producing reflected photons off of a target; a scanning unit comprising a Micro-Electro-Mechanical Systems (MEMS) mirror for changing an outgoing direction of the one or more laser beams; a light receiving unit comprising a MEMS mirror array and a plurality of photon detectors, the MEMS mirror array being configured to deflect the reflected photons to the plurality of photon detectors; and a control system for controlling the LiDAR system, the control system being configured to adjust the MEMS mirror and the MEMS mirror array.