Abstract: Cryogenic testing systems for testing electronic components such as wafers under cryogenic conditions are provided. The novel designs enable fast throughput by use of a cryogenically maintained test surface to which wafers may be rapidly introduced, cooled, and manipulated to contact testing elements while maintaining high quality cryogenic conditions. Thermal shielding is achieved by floating shields and/or flexible bellows that provide effective thermal shielding of the test environment while enabling manipulation of wafers with a wide range of motion. Also provided are novel door assemblies, chuck configurations, and vacuum plate bases that enable effective maintenance of cryogenic conditions and high throughput.

Abstract: Cryogenic testing systems for testing electronic components such as wafers under cryogenic conditions are provided. The novel designs enable fast throughput by use of a cryogenically maintained test surface to which wafers may be rapidly introduced, cooled, and manipulated to contact testing elements while maintaining high quality cryogenic conditions. Thermal shielding is achieved by floating shields and/or flexible bellows that provide effective thermal shielding of the test environment while enabling manipulation of wafers with a wide range of motion. Also provided are novel door assemblies, chuck configurations, and vacuum plate bases that enable effective maintenance of cryogenic conditions and high throughput.

Abstract: A surface finish measuring device for gear teeth. The device includes a probe for tracing an involute surface such of a gear tooth, a computer numerical control (CNC) machine for receiving perimeters relating to the geometry of the structure being measured and rotating the structure at a preferably constant angular velocity; and a computer for determining which measured points on the involute surface are to be used by a display device such as a strip chart recorder to graphically illustrate, in a highly magnified fashion, the topography of the involute surface being measured. The present invention overcomes the problems associated with the rate at which the distance between consecutive measurements changes when measuring an involute surface to provide a collection of relatively evenly spaced measurement points.

Abstract: An improved link arm assembly which couples a surface finish measuring instrument housing to an associated probe which is moved across a workpiece surface to evaluate surface finish characteristics. The link arm assembly enables a probe mounting arm to be rotated from an inoperative, generally vertical position to a rotated generally horizontal operating position in which the probe is positioned in contact with a workpiece surface. In accordance with the present invention, a clutching arrangement is provided which enables the probe mounting arm to be rotated freely from the operating to the normal position but which imposes fluid damping in the opposite direction of rotation which limits the angular velocity of the probe mounting arm and the impact forces which are imposed on the probe when it is being moved into contact with the workpiece. Accordingly, damaging high impact between the probe and workpiece is avoided.

Abstract: An expanding arbor apparatus for establishing the radial positioning of a workpiece of the type having a profiled internal surface. The arbor has a plurality of probe members which expand or contract when the separation between a pair of conical surfaces acting on the probe change. The radially outer end of the probes can be provided with any desired contour or shape to engage the workpiece surface in any desired manner. The arbor may be used with numerous workpiece internal profiles such as internal gear teeth or splines.