Abstract: A method for predicting pattern critical dimensions in a lithographic exposure process includes defining relationships between critical dimension, defocus, and dose. The method also includes performing at least one exposure run in creating a pattern on a wafer. The method also includes creating a dose map. The method also includes creating a defocus map. The method also includes predicting pattern critical dimensions based on the relationships, the dose map, and the defocus map.
Abstract: The current application is directed to autofocus subsystems within optical instruments that continuously monitor the focus of the optical instruments and adjust distances within the optical instrument along the optical axis in order to maintain a precise and stable optical-instrument focus at a particular point or surface on, within, or near a sample. Certain autofocus implementations operate asynchronously with respect to operation of other components and subsystems of the optical instrument in which they are embedded. The described autofocus subsystems employ multiple calibration curves to precisely adjust the z-position of an optical instrument.
Type:
Grant
Filed:
August 30, 2011
Date of Patent:
October 15, 2013
Assignee:
Applied Precision, Inc.
Inventors:
Jeremy Cooper, Paul Goodwin, Stephen G. Goodson
Abstract: A blade speed adjustable mechanism includes: a board having an opening; a shutter blade opening or closing the opening; a drive lever supported by the board and bringing the shutter blade into an overlapped operation or an expanded operation; a biasing member engaging the drive lever and biasing the shutter blade in an overlapped direction or in an expanded direction; a ratchet member engaging the biasing member and having ratchet teeth; an engagement member holding the ratchet member at a desired stop position and adjusting an biasing force of the biasing member by changing the stop position. The engagement member has a plurality of pawl portions different from each other in length. The pawl portion engages the ratchet tooth to hold the ratchet member at the stop position. A difference in length between the pawl portions is shorter than a distance corresponding to a pitch of the ratchet teeth.
Abstract: A blade drive device includes: a board including an optical path opening; a blade including a plurality of openings; a first drive source that swings the blade to move toward and away from the optical path opening; and a second drive source that changes a position of a swinging fulcrum of the blade relative to the board. The first drive source includes a first rotor and a first transmitting portion transmitting a rotation of the first rotor to the blade. The second drive source includes a second rotor and a second transmitting portion transmitting a rotation of the second rotor to the blade. The blade includes a cam slot engaging the first transmitting portion and a fitting hole into which the second transmitting portion slidably fits.
Abstract: A blade drive device includes: a blade; a drive source that drives the blade; and a chassis that has an opening opened and closed by the blade and that houses the blade and the drive source. The drive source includes: a rotor that is rotatably supported; a stator around which a coil for excitation is wound and which applies a rotational force to the rotor. The stator is arranged to surround a periphery of the opening and has a rectangular shape.
Abstract: A time recorder includes a first sensor that detects the side edge of a time card having a cut-out formed at at least one corner of the bottom, a second sensor that detects the bottom of the time card, and a card feeding unit that feeds the time card. When the time card is fed by this card feeding unit, a pulse counter of the card feeding unit counts the number of pulses of predetermined pulse signals after the first sensor detects the time card and until the second sensor detects the time card. Next, the front and back faces of the time card are determined based on the number of pulses that is a counting result. Hence, the front and back faces can be determined by the first sensor and the second sensor only.
Abstract: A blade driving device includes: a board including an opening; a blade movable between a position receding from the opening and a position overlapping at least a part of the opening; and a buffering member having a loop shape, having an elasticity, abutting the blade at an end of a movable range of the blade, and being deformable such that the loop shape is warped when abutting against the blade.
Abstract: A torso-covering garment for playing paintball having gripping areas to enable the user to grippably contact a gripping area of the garment with the butt stock of the gun. Each gripping area comprises a pliant, non-cushioning substrate. Common embodiments of the garment are shirts, jerseys, jackets, and vests. A method of playing paintball which comprises wearing the garment of the invention, and a method of fabricating the garment.
Abstract: A focal plane shutter includes: a board including an opening; blades capable of opening and closing the opening; a drive lever swingably supported, holding a movable iron piece and driving the blades; a self-holding type solenoid capable of adsorbing to the movable iron piece by a given attraction force in a non-energized state, and reducing the given attraction force in an energized state; a biasing member biasing the drive lever to move the drive lever away from the self-holding type solenoid; and a set member moving the drive lever to abut the drive lever with the self-holding type solenoid, wherein the self-holding type solenoid is energized to reduce the given attraction force when the drive lever is swung by the set member to abut the movable iron piece with the self-holding type solenoid.
Abstract: Provided is a rotary encoder, including: a rotary scale, which has a predetermined pattern including continuous patterns and a rotational angle original point formed thereon with reference to a pattern center, has a polygonal outer shape, and has the rotational angle original point defined with reference to at least one side of sides of the polygonal outer shape; a hub, which includes projections for abutting the sides of the polygonal outer shape of the rotary scale and positioning the rotary scale; a rotating shaft, which is press-fitted into the hub and rotates coaxially with the pattern center of the rotary scale; and detecting units for irradiating the rotary scale with light and detecting the light reflected by the rotary scale.
Type:
Grant
Filed:
March 17, 2011
Date of Patent:
July 16, 2013
Assignees:
Canon Kabushiki Kaisha, Canon Precision Inc.
Abstract: A system and method of image processing employ mathematical deconvolution to estimate the magnitude and location of a target object within an image. Both the nature of internal reflections and the convolution process by which each internal reflection contributes to blurring of the acquired image data may be measured and modeled. In accordance with mathematical deconvolution techniques, the combined effects of these internal reflections may be reduced to the extent that respective contributions of the target object and each individual reflection may be distinguished and quantified.
Abstract: A manually operated driver for precision support stages having coarse and optional fine position control. A yoke connected to a movable stage slides along a shaft parallel to the direction of motion of the stage. The yoke has opposing pivot members that can, in one position, contact the shaft to self-lock the position of the yoke on the shaft and, in another position, remain clear of the shaft thereby allowing the yoke to slide freely on the shaft for coarse position control. The shaft has threads at one end that turn into a support block. Turning of the shaft with a knob and with the yoke locked to the shaft, slowly changes the position of the yoke and the connected stage for fine position adjustment of the stage. A pair of such drivers in orthogonal orientation on parallel x-y movable stages will provide two dimensional motion of stages.
Abstract: A focal-plane shutter includes: a board including an opening; a leading blade and a trailing blade; a trailing blade lever; a first lever; a second lever; a self-holding type solenoid; a leading blade electromagnet and a trailing blade electromagnet; and a set lever.
Abstract: A focal plane shutter includes: a board including an opening; a drive lever swingably supported by the board, biased from a start end to a terminal end of a swingable range by a drive spring, and driving blades opening and closing the opening; and a set member rotating in a first direction to position the drive lever at the start end, and then rotating in a second direction.
Abstract: A system and methods are provide for modeling the behavior of a lithographic scanner and, more particularly, a system and methods are provide using thresholds of an image profile to characterize through-pitch printing behavior of a lithographic scanner. The method includes running a lithographic model for a target tool and running a lithographic model on the matching tool for a plurality of different settings using lens numerical aperture, numerical aperture of the illuminator and annular ratio of a pattern which is produced by an illuminator. The method then selects the setting that most closely matches the output of the target tool.
Type:
Grant
Filed:
September 30, 2009
Date of Patent:
May 7, 2013
Assignees:
Nikon Corporation, Nikon Precision Inc.
Abstract: A drive mechanism includes: an actuator including a rotor magnetized; a magnetic body, a magnetically attractive force being generated between the magnetic body and the rotor; and a sandwiched member sandwiched between the rotor and the magnetic body. At least one of the magnetic body and the sandwiched member is coupled to the rotor, and the magnetic body and the sandwiched member slidably contact each other.
Abstract: An anti-chop system for a pneumatic paintball marker that is automatically cleaned. The anti-chop eye system includes a transmitter and receiver arranged so as to sense the presence of a paintball within a breech using a beam of light. A moving member of the paintball marker automatically wipes at least one surface of the transmitter and/or receiver to remove contaminants such as paint, grease, dirt and the like. By automatically cleaning the anti-chop eye system, the reliability of the system is improved.
Abstract: An electrical connector comprises: a housing defining a plurality of walls and a receiving room surrounded by the walls, a metal shell enclosing the housing, a PCB located under the metal shell, a terminal module received in the housing and defining a plurality of terminals passing through the PCB and extending out of the metal shell and an insulative outer cover having a receiving cavity enclosing the metal shell, a block wall limiting the PCB moving forwardly and at least one convex limiting the metal shell moving rearwardly.
Abstract: A novel and unique pneumatic paintball marker having a variety of novel features, the first being an on/off compressed air control valve, positioned at the front of the marker below the barrel and adjacent to an in-line pressure regulator. Major innovations have been made in reducing the size and weight of the body of the marker, along with the construction of a new bolt assembly consisting of just four components and only one moving part. An anti-chop eye electronic system insures that the paintballs are in proper position, and rubber ball detents are optionally added to hold the paintballs in place prior to firing the marker, so that the paintballs will not roll out the barrel.
Type:
Grant
Filed:
May 1, 2012
Date of Patent:
March 19, 2013
Assignee:
Dye Precision, Inc.
Inventors:
David J. DeHaan, Bryon E. Benini, Eric L. Roberts, William R. Wing, Eero K. Kaakkola