Abstract: An elastomeric seal for use in semiconductor manufacturing apparatus comprising an ink on at least a portion of the upper surface thereof, wherein the ink comprises a barrier material, the barrier material being operable to prevent or reduce degradation of the elastomeric seal from ultraviolet (UV) radiation.
Type:
Grant
Filed:
May 6, 2016
Date of Patent:
June 22, 2021
Assignee:
PRECISION POLYMER ENGINEERING LTD.
Inventors:
Murat Gulcur, Christopher Julian Thornton, Paul Andrew Haworth, John Edward Kerwin
Abstract: An elastomeric seal for use in semiconductor manufacturing apparatus comprising an ink on at least a portion of the upper surface thereof, wherein the ink comprises a barrier material, the barrier material being operable to prevent or reduce degradation of the elastomeric seal from ultraviolet (UV) radiation.
Type:
Application
Filed:
May 6, 2016
Publication date:
May 23, 2019
Applicant:
PRECISION POLYMER ENGINEERING LTD.
Inventors:
Murat GULCUR, Christopher Julian THORNTON, Paul Andrew HAWORTH, John Edward KERWIN