Abstract: A heat spreader comprising a sheet of transparent diamond with an aperture therein that accommodates a solid-immersion lens (SIL). The heat spreader may be mounted within a clamp which allows the heat spreader to move freely across the Device Under Test (DUT) while maintaining a very high degree of planarity and contact between the diamond and the silicon substrate of the DUT. The DUT is secured to its electrical interface with a low profile clamp, the DUT may be held within the clamp by a mechanism that applies a pressure to the sides of the DUT package.
Type:
Grant
Filed:
December 10, 2007
Date of Patent:
April 23, 2013
Assignee:
Presto Engineering, Inc.
Inventors:
Daniel C. Canfield, John Joseph Harsany, Frank Sauk, William Joseph Yost, III