Abstract: A vacuum valve improving product performance of a packing ring to extend a replacement period of the packing ring is disclosed. As an opening and closing driving guide groove including a protruding groove section and first and second inclined groove sections is defined in each of both side surfaces of a driving block, and an L-motion roller inserted into and moving along the opening and closing driving guide groove is provided on an L-motion block, when the L-motion roller is disposed at an end of the first inclined groove section, one side surface of a valve blade closes an inlet, and when the L-motion roller is disposed at an end of the second inclined groove section, one side surface of the valve blade closely contacts an inner surface of the housing. The packing ring provided on a closing surface of the valve blade is blocked from contacting air or fluid.

Abstract: Disclosed is a gate valve which comprises a valve blade 120 which is configured to close the opening 112 in a valve housing 110; a valve rod 130 which is connected to the valve blade 120 and is configured to move in upward and downward directions and a horizontal direction; a guide housing 140 which is connected to an outer side of the valve housing 110; an L-motion block 150 which is engaged and connected to the valve rod 130, with a guide roller 151 being installed at both sides of the L-motion block 150; a cam block 160 which is installed in the interior of the guide housing 140; a driving rod engaging roller 172 which is installed at an lower end of the valve rod 130; a driving rod 170 in which the driving rod engaging roller 172 is inserted and guided and which has a driving rod slanted groove 171 obliquely formed in a closing direction “C” in a downward direction; an elasticity providing unit 175 which is configured to provide elasticity between the L-motion block 150 and the driving rod 170; and an upw

Abstract: An up and down operating actuator unit which manages upward and downward motions of an opening and closing member, and a forward and backward actuator unit which manages forward and backward motions of the opening and closing member are configured so that the opening and closing member, which opens and closes a wafer movement path, can be accurately operated in an “L”-shaped motion.

Abstract: A rectangular gate valve having an improved driving action is disclosed. The rectangular gate valve of the present invention includes a sealing member, which opens or closes a wafer moving passage, a main shaft, which is coupled to the sealing member and has a guide member, and a housing bracket, which has a first guide slot, into which the guide member is inserted. The gate valve further includes a valve drive unit, which is provided in the housing bracket and has an air cylinder, a piston, a piston shaft, a moving unit and a connection link. The gate valve further includes a guide bracket, which has a vertical bracket, a second guide slot and a horizontal bracket. The gate valve further includes a guide link, which is moved along the second guide slot to guide movement of the main shaft.