Abstract: An apparatus for inspecting semiconductor, or other types of, wafers is disclosed. The apparatus uses a robot arm to move wafers from an incoming location to an inspection location, and then to an outgoing location. The robot arm may be supported on a floating platform to prevent mechanical chafing and resulting contamination. The robot arm is constructed to have a free end which moves laterally, but not vertically. The arm may be retractable to reduce wobble when the wafer is being inspected. A wafer in the inspection position is inspected by scanning with an objective lens coupled to an associated optical system. If desired, an automatic discrimination system can be coupled to the optical system to permit discrimination between acceptable and non-acceptable wafers. The objective lens may face upwardly and the wafer downwardly to urge contaminants to fall from the wafer.