Patents Assigned to Princeton Lightware, Inc.
  • Method for dopant diffusion
    Patent number: 7964435
    Abstract: A method for controlling dopant diffusion is disclosed. Using certain control parameters that are not used in the prior art, the method provides an unprecedented measure of control over the dopant diffusion process. The control parameters include, among others, the size of the diffusion windows in the diffusion mask and the proximity of the diffusion windows to a dopant sink. In some embodiments, the diffusion process is conducted in an epi-reactor.
    Type: Grant
    Filed: March 7, 2007
    Date of Patent: June 21, 2011
    Assignee: Princeton Lightware, Inc.
    Inventors: Rafael Ben-Michael, Mark Allen Itzler, Xudong Jiang